01 introduction to microsystems packaging.pdf

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1、Source:FUNDAMENTALSOFMICROSYSTEMSPACKAGINGUNITCONVERSIONFACTORSTemperatureK

C273
C
1.8(
F32)
R

F460Length1m
1010A˚
3.28ft
39.4inMass1kg
2.2lbmForce1N
1kg-m/s2
0.225lbfPressure(stress)1P
1N/m2
1.45104psiEnergy1J
1W-s
1N-m
1V-C1J
0.239cal
6.241018eVCurrent

2、1A
1C/s
1V/CONSTANTSAvogadro’sNumber6.021023mole1GasConstant,R8.314J/(mole-K)Boltzmann’sconstant,k8.62105eV/KPlanck’sconstant,h6.631033J-sSpeedoflightinavacuum,c3108m/sElectroncharge,q1.61018CSIPREFIXESgiga,G109mega,M106kilo,k103centi,c102milli,m103m

3、icro,106nano,n109DownloadedfromDigitalEngineeringLibrary@McGraw-Hill(www.digitalengineeringlibrary.com)Copyright©2004TheMcGraw-HillCompanies.Allrightsreserved.AnyuseissubjecttotheTermsofUseasgivenatthewebsite.Source:FUNDAMENTALSOFMICROSYSTEMSPACKAGINGCHAPTER1

4、INTRODUCTIONTOMICROSYSTEMSPACKAGINGProf.RaoR.TummalaGeorgiaInstituteofTechnology.................................................................................................................DesignEnvironmentICThermalManagementPackagingMaterialsSingleChipOptoa

5、ndRFFunctionsDiscretePassivesEncapsulationICReliabilityICAssemblyInspectionPWBMEMSBoardManufacturingAssemblyTestDownloadedfromDigitalEngineeringLibrary@McGraw-Hill(www.digitalengineeringlibrary.com)Copyright©2004TheMcGraw-HillCompanies.Allrightsreserved.Anyuseis

6、subjecttotheTermsofUseasgivenatthewebsite.INTRODUCTIONTOMICROSYSTEMSPACKAGING.................................................................................................................1.1WhatAreMicrosystems?1.2MicrosystemTechnologies1.3WhatIsMicrosystemsPa

7、ckaging(MSP)?1.4WhyIsMicrosystemsPackagingImportant?1.5System-LevelMicrosystemsTechnologies1.6WhatisExpectedofYouasaMicrosystemsEngineer?1.7SummaryandFutureTrends1.8WhoInventedMicrosystemsandPackagingTechnologies?1.9HomeworkProblems1.10SuggestedReadingCHAPTEROBJ

8、ECTIVES
IntroducetheconceptofMicrosystems
PresentMicrosystemsbuildingblocktechnologiestocontainMicroelectronics,Photonics,MEMS,andRF/Wireless
DescribetheroleofPackagi