基于纳米薄膜的卷曲微弹簧研究

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1、万方数据一．垒!!!竺!——AbstractMicro／nanostructures，suchasmicro／nano—dots，wires，rodsandsheets，havebeenintenselyinvestigatedduetotheirpotentialapplicationsinthefieldsincludingphysics，optics，sensingandmicroelectronics．Duringthepastdecade，rolled。upnanotechnology,whichtakesadvantageofbo

2、thBottom—UpandTop—Downmethods，hasbeenemployedtofabricateunique3Dmicrostructuresbyrollinguppre—strainednanomembranesuponreleasefromasacrificiallayer．Inthisthesis，novelrolled—upmicrostructureshavebeensuccessfullyfabricatedandtheiruniquepropertieshavebeeninvestigated．Forthefir

3、sttime，Timicrospringswerefabricatedbydeterministicrollingofanisotropicstrain-engineerednanomembranesviaglancingangledeposition(GLAD)．Theparametersofmicrospringscanbewellcontrolled．Thediameterincreaseswiththethicknessincreasing，andthehelicityangleandthechiralityaredetermined

4、bythemisalignedanglebetweentheorientationofthestripandthepreferablerollingdirection．AliquidflowratesensorwasdesignedbasedonthatTimicrospringscanbestretchedwhenplacedintoflowwater．TherelationshipbetweentheelongationofTimicrospringsandflowratewasquantativelyanalyzed。Resultsde

5、monstratethatTimicrospringsshowasuperelasticitybehaviorwithagoodreliability．Polyvinylalcohol-poly(acrylicacid)(PVA—PAA)／metalmicro—scrolls(springsandtubes)werefabricatedbyrolled—upnanotechnology．Stimuli—responsivebehaviorofmicro—scrollswasdemonstratedbyrollingandunrollingca

6、usedbythevolumechangeofthePVA-PAAhydrogelinresponsetoenvironmentalfluids．Moreover,thestrainofPVA．PAAlayerinmicrotubesandmicrospringsduringthedeformationwascalculated．Itisfoundthatthestraininmicrospringsissmallerthanthatinmicrotubesduetothepartialstrainrelaxationperpendicula

7、rtotherollingdirectioninmicrosprings．Keywords：rolled—upnanotechnology，microspring，microtube，superelasticity,stimuli—responsiveCLCNumber：rrN305／TB434万方数据第一章绪论复旦大学硕士学位论文1．1引言近年米，微纳尺度的结构与器件由于其独特的物理、化学性质在各个领域拥有广阔的应用前景，而成为当前的研究热点。典型的微纳结构有以下几种：点结构、线结构、管状结构以及螺旋结构等【1。31。此类微纳结构与器件在能

8、量存储、药物传输、传感、光学以及微驱动等领域具有巨大的发展空间，冈而引起广大科研工作者浓厚的兴趣⋯o】。通常来说，得到微纳结构的途径有两种：白上而下(Top—Dow