光刻机双驱动微动台温度场分析

《光刻机双驱动微动台温度场分析》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、AbstractratureexperimentofXYplanarmotorstator.ThetemperatureofXYplanarmotorstatorisanalyzedwithoutwater-coolingdevice，thispapermeasuresthetempetureonthesurfaceofcoolingplate，waterinlet，wateroutlet，andthecoilwinding.Bycomparingtheexperimentaldatasandsimulationresults，thec

2、oilwindingundertheeffectofwatercoolingdeviceiscooling.Keywords:lithographymachine，waferstage，waferliftinggear，thermalanalysis，thermal-structurecouplinganalysis，temperaturemeasuringexperiment.-III-目录目录摘要.....................................................................

3、.....................................................IABSTRACT...............................................................................................................II第1章绪论...........................................................................................

4、................11.1课题背景及研究的目的和意义.......................................................................11.2光刻机工件台的国内外研究现状...................................................................21.2.1光刻机工件台的国外研究现状...............................................................

5、21.2.2光刻机工件台的国内研究现状...............................................................41.3有限元分析方法的基本思想...........................................................................61.4本文的主要研究内容.....................................................................................

6、..6第2章热源分析及计算...........................................................................................82.1引言...................................................................................................................82.2微动台实体模型的建立................................

7、...................................................82.3热源的分析及计算.........................................................................................102.3.1热源的分析.............................................................................................102.3.2热传递的三种基

8、本方式.........................................................................112.3.3XY平面电机热载荷计算.........