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ID:34104463
大小:2.86 MB
页数:56页
时间:2019-03-03
《光刻机双驱动微动台温度场分析》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、AbstractratureexperimentofXYplanarmotorstator.ThetemperatureofXYplanarmotorstatorisanalyzedwithoutwater-coolingdevice,thispapermeasuresthetempetureonthesurfaceofcoolingplate,waterinlet,wateroutlet,andthecoilwinding.Bycomparingtheexperimentaldatasandsimulationresults,thec
2、oilwindingundertheeffectofwatercoolingdeviceiscooling.Keywords:lithographymachine,waferstage,waferliftinggear,thermalanalysis,thermal-structurecouplinganalysis,temperaturemeasuringexperiment.-III-目录目录摘要.....................................................................
3、.....................................................IABSTRACT...............................................................................................................II第1章绪论...........................................................................................
4、................11.1课题背景及研究的目的和意义.......................................................................11.2光刻机工件台的国内外研究现状...................................................................21.2.1光刻机工件台的国外研究现状...............................................................
5、21.2.2光刻机工件台的国内研究现状...............................................................41.3有限元分析方法的基本思想...........................................................................61.4本文的主要研究内容.....................................................................................
6、..6第2章热源分析及计算...........................................................................................82.1引言...................................................................................................................82.2微动台实体模型的建立................................
7、...................................................82.3热源的分析及计算.........................................................................................102.3.1热源的分析.............................................................................................102.3.2热传递的三种基
8、本方式.........................................................................112.3.3XY平面电机热载荷计算.........
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