光学微环谐振腔应力调制的研究

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1、中北大学学位论文andstressmodulationperformancetestexperimentofasingleloop,bicycliccascadeopticalmicro-ringresonatorsensitivecellstructurewerecompleted.Thecharacteristicofstress/strainsensitivitywascalculatedtheoretically.Forthesingleloopstructure,twovaluesof93.72pm/MPaand11.06

2、pm/microstrainwereobtainedexperimentally,andforthebicycliccascadestructure,thevaluewas184.73pm/MPaand18.04pm/microstrainobtained,whichalsowasverifiedbytheoreticalsimulations.Finally,thenewstress-modulationmechanismofopticalmicro-ringresonatoremployedastheintermediatese

3、nsingelementwasverified,whichcouldbeappliedtotheresearchonMOEMSmechanicalsensors.Keywords:StressModulation,Micro-ringResonator,ResonantSpectrum,MechanicalSensors,Silicon-On-Insulator万方数据中北大学学位论文目录第一章绪论....................................................................

4、.....................................11.1论文研究背景及意义.....................................................................................................11.2论文的国内外发展现状.................................................................................................21.2.1S

5、i基光学微环谐振腔结构及器件研究方面...........................................................21.2.2Si基光学微环谐振腔应力调制及器件研究方面...................................................51.3论文的主要研究内容.....................................................................................................

6、.8第二章光学微环谐振腔应力调制机理...........................................................102.1引言...............................................................................................................................102.2光学微环谐振腔回音壁模式（WGM）....................................

7、..................................102.2.1品质因子................................................................................................................102.2.2自由频谱宽度...................................................................................................

8、.....112.2.3半高全宽.....................................................................................................