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1、内蒙古工业大学硕士学位论文AbstractPropertiesofmaterialiscloselyrelatedtothemicro-structureofthematerialandthedefectsofitself,sothattheresearchofmicroscopicdefectsofmaterialiswidlyattentedbyresearchers.Themicro-crackisacommonstructuredefectsinmaterial,andithasagreateffectonthepropertiesofmaterial
2、,theinitiationanddevelopmentofmicroscopiccracksisalsoclosedwithmechanicalpropertiesofmaterial,andcancausethedeformationandfailureofmaterial.Therefore,itisveryimportanttostudythematerialmicro-crack.Manyscholarsmadealotofreportandresearchonthestressandstrainofmaterial,soastoaccelerate
3、thedevelopmentofstrainmeasurementtechnique.Inrecentyears,researchershavedevelopedavarietyofmethodwhatcanusedfortestingandanalysisingmaterialdeformationfieldsinmicroscalecombinedwiththehighspatialresolutionofmodernanalyticalinstrument,thereinto,themethodsofthepeakpairsanalysisandtheg
4、eometricphaseanalysishavebeenusedtoanalysisthehighresolutiontransmissionelectronmicroscopyimages,andcouldobtaininformationofthequantitativedeformationinnanoscale.Butbecauseofitisdifficultyofloadinginthetransmissionelectronmicroscope,thesemethodshavenotyetusedforinsitudeformationanal
5、ysis.Thisarticlemadethesiliconpillarsarrayofsub-micronscaleonthesurfaceofsinglecrystalsiliconwaferusingthemethodofcombiningholographicexposureandplasmaetchingtechnology,andpresetasmallholeinthecenterofsiliconwafer,thenusedamethodofin-situpullstretchofscanningelectronmicroscope,andun
6、iaxialtensiletestswereperformedonsinglecrystalsilicon,andthenobservedandrecordedtheprocessofinitiationanddevelopmentofcrackunderthecontinuousloads.Respectively,usedthePeakPairsanalysisandGeometricPhaseanalysistocaculatethestrainmapofmicro-crackareaofSEMimageofsinglecrystalsilicon,an
7、dcomparedtheresultsoftheexperimentaldatawiththelinearelastictheorypredictionanalysis,andcangetaconclusionoflinearelastictheoretypredictioncanexpressmicro-cracktipofsinglecrystalsiliconinthesub-microscale,particularly,atfar-fieldregionofthemicro-cracktip,theexperimentalresultsandthet
8、heoreticalpredictio
