低温三步法成分调控对pi衬底cigs薄膜材料与器件影响的分析

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1、AbstractCopperindiumgalliumselenide(Cu(In，Ga)Se2，CIGS)thinfilmsolarcellwithadvantagesofhighconversionefficiency，goodstabilityandanti—radiationability，isoneofthemostpromisingthin-filmsolarcells．Owingtotheadvantagesofhighpowertoweightratio，suitabletoroll—to-rolldepositionprocess，mono

2、lithicintegrationandflexiblefoldable，commercialdevelopmentprospectsofCIGSthinfilmsolarcelldepositedonflexiblepolyimidesubstrategetextensiveattentions．Atpresent，theconversionefficiencyofCIGSthinfilmsolarcellonPIfoilhasbeenimprovedto20．4％bySwissFederalLaboratoriesforMaterialSciencean

3、dTechnology(EMPA)，whichisalsotheconversionefficiencyworldrecordofCIGSminfilmsolarcells．Inthispaper,theinfluenceofcompositioncontrolonCIGSthinfilmpropertiesanddeviceperformanceareinvestigated，includingdepositionrateandgradientdistribution．ForlargeareaCIGSthinfilmsolarcellsonPIsubstr

4、ates，studiesofMobackcontactonPIfoils，metalgrid，filmuniformityandotheraspectsarealsocarriedOtat．SincethemaximumtemperatureforPIistypicallybelow4500C，CIGSdepositionhastousetheSOcalledlow—temperaturethree-stagec0一evaporationprocess．Becauseoftherestrictionofmaximumsubstratetemperatures

5、，CIGSthinfilmshavethedisadvantagesofpoorcrystallizationquality,roughsurfaceandsteepcompositiongradient，whichresultinpoordeviceperformance．DepositionrateandelementgradientdistributionarekeyissuesofhighqualityCIGSthinfilmsandcorrespondingdevices．Inthesecondstageofthree—stageprocess，C

6、IGSfilmsexperienceaseriesofphasetransitions，depositionrateinthisstagehasasignificantimpactonthegrowthmechanismofCIGSthinfilms．DuringthesecondstagethecrystallinityandgraincompactnessofCIGSthinfilmsarepromotedwithincreasingdepositionrates，double．peakreflectionpatternisreducedobviousl

7、y,whichCanreducetheIIIAbstractrecombinationinthegrainboundaryandhelptoimprovetheconversionefficiencyoftheCIGSsolarcellsignificantly．However,accordingtotheexperimentalresults，highergrowthratesduringthesecondstageleadtoroughersurfaceandlowercarrierconcentration．Highersurfaceroughness

8、canbeattributedtothelarger