低温三步法成分调控对pi衬底cigs薄膜材料与器件影响的分析

低温三步法成分调控对pi衬底cigs薄膜材料与器件影响的分析

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时间:2019-03-01

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1、AbstractCopperindiumgalliumselenide(Cu(In,Ga)Se2,CIGS)thinfilmsolarcellwithadvantagesofhighconversionefficiency,goodstabilityandanti—radiationability,isoneofthemostpromisingthin-filmsolarcells.Owingtotheadvantagesofhighpowertoweightratio,suitabletoroll—to-rolldepositionprocess,monolithicintegra

2、tionandflexiblefoldable,commercialdevelopmentprospectsofCIGSthinfilmsolarcelldepositedonflexiblepolyimidesubstrategetextensiveattentions.Atpresent,theconversionefficiencyofCIGSthinfilmsolarcellonPIfoilhasbeenimprovedto20.4%bySwissFederalLaboratoriesforMaterialScienceandTechnology(EMPA),whichisa

3、lsotheconversionefficiencyworldrecordofCIGSminfilmsolarcells.Inthispaper,theinfluenceofcompositioncontrolonCIGSthinfilmpropertiesanddeviceperformanceareinvestigated,includingdepositionrateandgradientdistribution.ForlargeareaCIGSthinfilmsolarcellsonPIsubstrates,studiesofMobackcontactonPIfoils,me

4、talgrid,filmuniformityandotheraspectsarealsocarriedOtat.SincethemaximumtemperatureforPIistypicallybelow4500C,CIGSdepositionhastousetheSOcalledlow—temperaturethree-stagec0一evaporationprocess.Becauseoftherestrictionofmaximumsubstratetemperatures,CIGSthinfilmshavethedisadvantagesofpoorcrystallizat

5、ionquality,roughsurfaceandsteepcompositiongradient,whichresultinpoordeviceperformance.DepositionrateandelementgradientdistributionarekeyissuesofhighqualityCIGSthinfilmsandcorrespondingdevices.Inthesecondstageofthree—stageprocess,CIGSfilmsexperienceaseriesofphasetransitions,depositionrateinthiss

6、tagehasasignificantimpactonthegrowthmechanismofCIGSthinfilms.DuringthesecondstagethecrystallinityandgraincompactnessofCIGSthinfilmsarepromotedwithincreasingdepositionrates,double.peakreflectionpatternisreducedobviously,whichCanreducetheIIIAbstractrecombinationinthegrainboundaryandhelptoimprovet

7、heconversionefficiencyoftheCIGSsolarcellsignificantly.However,accordingtotheexperimentalresults,highergrowthratesduringthesecondstageleadtoroughersurfaceandlowercarrierconcentration.Highersurfaceroughnesscanbeattributedtothelarger

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