欢迎来到天天文库
浏览记录
ID:33772269
大小:23.77 MB
页数:50页
时间:2019-03-01
《铜与钯包覆铜引线键合界面结构演变的原位实验分析》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、Abs订actAbstractAccordiIlgtoMoore’sLaw,thefbaturesizeofsemiconductordeVicesbecomesmallerandsmaller,andmechip血egrationdegreekeepsiIlcreasing.mparticular,accomp锄ywim廿ledeVelopmentofhighchip缸e刚ionalld岫itsizereduction,memctalnerco衄ects,i.e.nlewhbondillg,arebecomiIlgachallengiIlgpmblem.CopperwireisbelieVe
2、dasanimportantmetalforwirebond.mgi11Steadofgoldforitsanractiveadvamagessuchaslowcost,favorableelec仃ical锄dtllennalconductivities,excellentmechallicalproperties.However,beyondthoseadvalltages,bareCuwiresstillsuH研舶moxidizationa11dbadnexibili够Recently;palladium—coatedcopper(PCC)wirehasb∞nirItroducedtooV
3、ercomethepmblemsourrediIlbareCuwire.A胁oughⅡleoxidaIionproblemmaybepreVentedbysurfacecoatillg,t}leheatillg仃ea恤entsd嘶ngchipmallufacturmgpmcess,aswellast11ethe咖alconditiollsmattllechipmaySufrerdu血gworkillg,couldillduceunexpectedproblemsofthebond加gi11terface.Currently,meevolutionsoftlleillte恤cialmicrost
4、mcturesaswellastheirmechanismsi11山ebondiIlgi11terfacedurillgthemalconditionarestiUuncleari11botllcopperaIldPCCbondings.ESpecially,thebehaViorofPdatomdi觚sion锄dt11efoHnationofal哪乒numberofvoids证PCCbondingsstillrequ№detailedeXplanations.hl-sim仃蚰smissionelec仃帆micmscope(TEM)hashi曲spatialrcsolution锄dsh。ong
5、锄alysisabili够WimfbtCCDc锄eras,TEMcanalsorecordt11edyIlaJllicsnⅥctureev01utionoftheta曙ets啪pleiIlrealtime.Comb协edwitllmulti-nmctionholders,TEMcanalsoexertdiversefieldsandloadson廿les锄ple锄dsyllchronouslymon“orthe.rstⅢctllres锄dcomponenteVoIutions.Hence,inshTEMpmVidesaIladv柚cedtechniquetoeXplorcmeupperment
6、ionedissuesint11ebondillgitlter角cesofCu锄dPCC.111mist11esis,wehavepreparedTEMs锄plesbycuttiIlgCu肌dPCCwirebondjIlgsusiIlgfocusedionbeammemodandstudiedmeevol砸onsofthesetwodi仃brentwirebondillgmicrostrIlcturesbyi11situa衄ealiIlginside廿leTEM.1hemaillfindingsaresummarjzedasfollows:1.In—situ锄ealiIlgtIleCuwire
7、bondiIlg:(1)Compositiona11alysisofi11terfacesnlJctureeV01ution.Beforeannealing,isolatedcu·AlIMCdis劬utesillthebond№i11temce.ThemaillcomponentofMciscu9A14锄d廿1eminorcomponentofIMCisCuAl2.ARerannealiIlgat
此文档下载收益归作者所有