微细工具电极在线制备装置开发与加工技术的-研究

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1、广东工业大学硕士学位论文实验，取得了预期效果，同时验证了该装备具有很高的精度和稳定性。关键词：微细电火花，反拷块，线电极放电磨削，伺服控制系统lIAbstractMicroIfabricationhaswideapplicationinmanyareasofprecisionmolds，aerospace，precisioninStruments，bio．medicaletc．Therearemanydevelopedmicrofabricationmethods．such弱micro．EDM，microelectrochemi

2、calmachining，microultrasonicmachining，etc．whichrequiretheuseofmicro．electrodetoachievetheprocessingofthemicro．structure．Forexample，theprocessingoftheaxisoftheelectrodewithasimpleshapeoffineporousslotandtinythree．dimensionalcavity，usingthearrayoftinyelectrodesonthegro

3、upofholesandcomplexcavityprocessing．Inordertoensurethescaleandprecisionofthemicrofabrication，ithascorrespondingrequirementsontheuseofthet001electrodesize，shape，positionaccuracyandsurfacequality．Inaddition，itisalsocriticaltominimizetheadverseeffectsofthetoolelectrodep

4、ositionaccuracyofthemicro．machining，SOyouneedonline，andpreparetoavoidtheduplicationoftheelectrodeduetothesecondfixturepositioningerrorsandfixtureerrors．PrecisionmanufIact耐ngmethodstoproduceadiameterassmallasafewmicronsofthemicro．electrode，suchasturning，milling，grindi

5、ngmethod，LIGA，buttheygenerallyCannotachieveonlinepreparationtoolelectrode，whichmakesitdifficulttomatchfoiloW．upfineprocess．Whethermicro—electrodecallbeachievedonlinepreparationornothasbecomethepremiseofmanymicrofabricationmethodsandoneofthekeys-Therefore，ithasfar．rea

6、chingsignificancetoindependentlydevelopadedicatedmicro．．toolelectrodepreparationdevice．FinelineelectrodepreparationmethodsincludeBEDG(blockelectrodedischargegrinding)method，WEDG(wireelectrodedischargegrinding)method，electrochemicalcorrosion，EEDG(edgeelectrodeEDMgrind

7、ingmethod)act，whichareEDMmethods·Throughthetoolelectrodepreparationtechniquesarereviewed，andthendeterminethecombinationofWEDGandBEDGastheprogram．TheDaperdiscussedthedevelopmentofmicro—toolelectrodepreparationdeviceinIII广东工业大学硕士学位论文detail，includingturntablediameter700

8、mm，precisiondisplacementunits，granitecountertopsandcolumns，onthebasisoftheseoverallstructuraldesign，micro-electrodedesignofprocessi