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ID:33737568
大小:2.97 MB
页数:72页
时间:2019-02-28
《微细工具电极在线制备装置开发与加工技术的-研究》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、广东工业大学硕士学位论文实验,取得了预期效果,同时验证了该装备具有很高的精度和稳定性。关键词:微细电火花,反拷块,线电极放电磨削,伺服控制系统lIAbstractMicroIfabricationhaswideapplicationinmanyareasofprecisionmolds,aerospace,precisioninStruments,bio.medicaletc.Therearemanydevelopedmicrofabricationmethods.such弱micro.EDM,microelectrochemi
2、calmachining,microultrasonicmachining,etc.whichrequiretheuseofmicro.electrodetoachievetheprocessingofthemicro.structure.Forexample,theprocessingoftheaxisoftheelectrodewithasimpleshapeoffineporousslotandtinythree.dimensionalcavity,usingthearrayoftinyelectrodesonthegro
3、upofholesandcomplexcavityprocessing.Inordertoensurethescaleandprecisionofthemicrofabrication,ithascorrespondingrequirementsontheuseofthet001electrodesize,shape,positionaccuracyandsurfacequality.Inaddition,itisalsocriticaltominimizetheadverseeffectsofthetoolelectrodep
4、ositionaccuracyofthemicro.machining,SOyouneedonline,andpreparetoavoidtheduplicationoftheelectrodeduetothesecondfixturepositioningerrorsandfixtureerrors.PrecisionmanufIact耐ngmethodstoproduceadiameterassmallasafewmicronsofthemicro.electrode,suchasturning,milling,grindi
5、ngmethod,LIGA,buttheygenerallyCannotachieveonlinepreparationtoolelectrode,whichmakesitdifficulttomatchfoiloW.upfineprocess.Whethermicro—electrodecallbeachievedonlinepreparationornothasbecomethepremiseofmanymicrofabricationmethodsandoneofthekeys-Therefore,ithasfar.rea
6、chingsignificancetoindependentlydevelopadedicatedmicro..toolelectrodepreparationdevice.FinelineelectrodepreparationmethodsincludeBEDG(blockelectrodedischargegrinding)method,WEDG(wireelectrodedischargegrinding)method,electrochemicalcorrosion,EEDG(edgeelectrodeEDMgrind
7、ingmethod)act,whichareEDMmethods·Throughthetoolelectrodepreparationtechniquesarereviewed,andthendeterminethecombinationofWEDGandBEDGastheprogram.TheDaperdiscussedthedevelopmentofmicro—toolelectrodepreparationdeviceinIII广东工业大学硕士学位论文detail,includingturntablediameter700
8、mm,precisiondisplacementunits,granitecountertopsandcolumns,onthebasisoftheseoverallstructuraldesign,micro-electrodedesignofprocessi
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