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1、NANO-ANDMICROELECTROMECHANICALSYSTEMSFundamentalsofNano-andMicroengineeringAbookintheNano-andMicroscience,Engineering,TechnologyandMedicineSeriesNANO-ANDMICROELECTROMECHANICALSYSTEMSFundamentalsofNano-andMicroengineeringSergeyEdwardLyshevskiCRCPressBocaR
2、atonLondonNewYorkWashington,D.C.LibraryofCongressCataloging-in-PublicationDataLyshevski,SergeyEdward.Nano-andmicroelectromechanicalsystems:fundamentalsofnano-andmicroengineering/SergeyEdwardLyshevski.p.cm.--(Nano-andmicroscience,engineering,technology,an
3、dmedicineseries)Includesindex.Includesbibliographicalreferencesandindex.ISBN0-8493-916-6(alk.paper)1.Microelectromechanicalsystems.1.Title.II.Series.TK7875.L962000621.381—dc20100-057953CIPThisbookcontainsinformationobtainedfromauthenticandhighlyregardeds
4、ources.Reprintedmaterialisquotedwithpermission,andsourcesareindicated.Awidevarietyofreferencesarelisted.Reasonableeffortshavebeenmadetopublishreliabledataandinformation,buttheauthorandthepublishercannotassumeresponsibilityforthevalidityofallmaterialsorfo
5、rtheconsequencesoftheiruse.Neitherthisbooknoranypartmaybereproducedortransmittedinanyformorbyanymeans,electronicormechanical,includingphotocopying,microfilming,andrecording,orbyanyinformationstorageorretrievalsystem,withoutpriorpermissioninwritingfromthep
6、ublisher.TheconsentofCRCPressLLCdoesnotextendtocopyingforgeneraldistribution,forpromotion,forcre-atingnewworks,orforresale.SpecificpermissionmustbeobtainedinwritingfromCRCPressLLCforsuchcopying.DirectallinquiriestoCRCPressLLC,2000N.W.CorporateBlvd.,BocaRa
7、ton,Florida33431.TrademarkNotice:Productorcorporatenamesmaybetrademarksorregisteredtrademarks,andareusedonlyforidentificationandexplanation,withoutintenttoinfringe.©2001byCRCPressLLCNoclaimtooriginalU.S.GovernmentworksInternationalStandardBookNumber0-8493
8、-916-6LibraryofCongressCardNumber00-057953PrintedintheUnitedStatesofAmerica1234567890Printedonacid-freepaperTomyfamilyPREFACEThisbookisdesignedforaone-semestercourseonNano-andMicroelectromechanicalSystemsorNano-andMicroeng
