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1、NANO-ANDMICROELECTROMECHANICALSYSTEMSFundamentalsofNano-andMicroengineeringAbookintheNano-andMicroscience,Engineering,TechnologyandMedicineSeriesNANO-ANDMICROELECTROMECHANICALSYSTEMSFundamentalsofNano-andMicroengineeringSergeyEdwardLyshevskiCRCPressBocaRatonLondonNewYorkWashington,D.C.
2、LibraryofCongressCataloging-in-PublicationDataLyshevski,SergeyEdward.Nano-andmicroelectromechanicalsystems:fundamentalsofnano-andmicroengineering/SergeyEdwardLyshevski.p.cm.--(Nano-andmicroscience,engineering,technology,andmedicineseries)Includesindex.Includesbibliographicalreferencesa
3、ndindex.ISBN0-8493-916-6(alk.paper)1.Microelectromechanicalsystems.1.Title.II.Series.TK7875.L962000621.381—dc20100-057953CIPThisbookcontainsinformationobtainedfromauthenticandhighlyregardedsources.Reprintedmaterialisquotedwithpermission,andsourcesareindicated.Awidevarietyofreferencesar
4、elisted.Reasonableeffortshavebeenmadetopublishreliabledataandinformation,buttheauthorandthepublishercannotassumeresponsibilityforthevalidityofallmaterialsorfortheconsequencesoftheiruse.Neitherthisbooknoranypartmaybereproducedortransmittedinanyformorbyanymeans,electronicormechanical,inc
5、ludingphotocopying,microfilming,andrecording,orbyanyinformationstorageorretrievalsystem,withoutpriorpermissioninwritingfromthepublisher.TheconsentofCRCPressLLCdoesnotextendtocopyingforgeneraldistribution,forpromotion,forcre-atingnewworks,orforresale.Specificpermissionmustbeobtainedinwrit
6、ingfromCRCPressLLCforsuchcopying.DirectallinquiriestoCRCPressLLC,2000N.W.CorporateBlvd.,BocaRaton,Florida33431.TrademarkNotice:Productorcorporatenamesmaybetrademarksorregisteredtrademarks,andareusedonlyforidentificationandexplanation,withoutintenttoinfringe.©2001byCRCPressLLCNoclaimtoor
7、iginalU.S.GovernmentworksInternationalStandardBookNumber0-8493-916-6LibraryofCongressCardNumber00-057953PrintedintheUnitedStatesofAmerica1234567890Printedonacid-freepaperTomyfamilyPREFACEThisbookisdesignedforaone-semestercourseonNano-andMicroelectromechanicalSystemsorNano-andMicroeng
