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1、ABSTRACTABSTRACTMicro-mechanicalsystems(MEMS),withitsadvantagesofminiaturizationandintegration,hasaverywiderangeofapplicationsandbroadprospectsinthefieldofautomotive,biomedical,information,military,andaerospaceengineering.However,thetraditionalresearchmethodofmicromechanicalsystemisgene
2、rallybasedonresearchingofmaterial,analyzingdevicestructureandprocess,makingthedeviceandthendetectingtheperformanceofthedevice,thisprocessextendstheresearchtime,andincreasesthecosts.Computer-aideddesigncaneffectivelyshortendevelopmenttimeorreducecosts,aprocessonacomputersimulatorthatcang
3、eneratethree-dimensionalmodelandtheperformanceofthesimulationcanbedonesimultaneously.Atpresent,articlesofdomesticresearchonsensorusingcomputeraideddesignisless,thiskindofresearchmethodisnotyetperfect.Thispaperintroducestheapplicationanddevelopmentofmicromechanicalsystemandtheprocessofco
4、mputeraideddesignofmechanicalsystem.Designprocessonlyneedsstructuredesign,2Dmasklayoutandprocessflowgeneratedthree-dimensionalmodels,componentmaterialpropertiesextractedfromthematerialdatabasewillbeaddedintothegeometricmodeltogeneratethethree-dimensionalentitymodelcomplete,meshformulti-
5、physicscouplinganalysisandsystemlevelsimulationanalysisandsimulation.Inaddition,thispaperalsointroducedtheprocessingtechnologyofsemiconductormanufacturing.Takingaccelerationsensorasanexample,afterstudyingtheworkingprincipleofcapacitiveaccelerationsensor,thevariablepolecapacitiveaccelero
6、meterischoosedasanobject,twokindsofsensitivestructureofcapacitiveaccelerationsensorisanalyzedbyusingprofessionalsimulationsoftwareIntelliSuite.Determinedtheprocessofmodelinganalysis,completedstructurallayoutdesign,analyzedstaticsanddynamicssimulationofcantileverstructureandforkfingerstr
7、ucturecapacitiveaccelerationsensor.Impactofthelength,width,thicknessofsinglebeamiscomparedwithdifferentmodels,theperformanceofthedeviceisoptimized.TheresultsshowthatbymeansofII万方数据ABSTRACTincreasingthelengthofthebeam,reducingthewidthandthicknesscanmeettherequirementsofimproving
