三轴微机电陀螺仪微惯性测量的研究

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1、AbstractT程硕士论文DevelopingwiththeMEMStechnology，MEMSGyrotoMEMSsensorsasthecorehasmadegreatdevelopmentininertialnavigation，automotivem钔ufacturing，aerospaoeandindustrialcontr01．Atpresent，mostofdomesticgyroscopeissingle-axismeasurementgyro．Three-axisGyroisMIMUthathascombinedthreeaxialMGandMMA．Itc

2、a3meEisurethreeaxialangularvelodty，angleandacceleration．Themaincontentofthisartideishowtosampleandoutputthreeaxialangularvelodty,angleandaccelerationbyThree-axisGyro．ItshowsasfoilowsThree-axisGyrohardwaredrcuitiSdesignedasfo

3、IOWS：PowerisolationtorestralneKternalnoise；Digitalisolationtorestra

4、nexternalnoise；MMGwithRCfilterscanenhandngsamplingaccuracy；Inordertorestralnexternalnoise,Butterworthfilterwasincreasedinthethree-axisgyro．Somemalnlyerrorsofthree-axisGyroareanalyzed，indudingtemperatureerrorandrandomerror．Thetemperaturecharacteristicsofgyroarestudied，thetemperaturecompensati

5、onmodelsofgyroareestablished。andnon-stationaryrandomsignalofgYrodriftisstudied．Analyzingthegyro'sdata,theARmodeloftherandomerrorisestablishedbyusingrandomsignalprocessingmethodsaldtimeseriesanalysistheory．TherandomerrorbymakinguseofKalmanfilterbaseontheARmodelcanbedecreasedThemainpurposeofth

6、ree-axisGymsoftwareissamplingMEMSsensor’sdataanddecreasingthegymdriftbySoftwarealgorithm．Aftersa'nplingthesignalofgym，KalmanfilterandButterworthfilterwilIfilterthesignalaldseparateerrorfrOmit．Keyword：MEMSGyroscope,InertialMeesurement，Gyrodrift，Erroranalysis,Errorcompensation南京理下人学．丁程硕L论文三轴微机

7、电陀螺仪惯性测最：岍究目录摘要．．．．．．．．．．．．．．。．．．．．。．．．．．．．。．．．．．。．．．．．。．．．⋯⋯．。．．⋯．．．．．。．。．．。．．．．⋯⋯⋯．。．．．．。．。。．。IAbstract．．．．．．．．．．．．．．．⋯⋯⋯．．．⋯．．．．．．．．．．．．．．．⋯．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．11l绪论。．．．．．⋯．。。．．．．。．．。．⋯．．．。．．．．．．．．⋯⋯⋯⋯⋯⋯⋯．⋯．。．．。．．⋯．．⋯⋯⋯．．。．．．．．。．．。．．。l1．1课题背景及意义⋯⋯⋯⋯⋯

8、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．2MEMS惯性测量研究现状⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．21．3研究内容及其安排⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。42三轴微机电陀螺仪介绍⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．62．1MEMS陀螺仪工作原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。62．2三轴微机电陀螺仪简介⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。72．3本章小结⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯113三轴微