双波长单光栅纳米测量中激光器性能非理想的影响

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1、Seediscussions,stats,andauthorprofilesforthispublicationat:https://www.researchgate.net/publication/289974291Effectofnon-idealperformanceoflasersindual-wavelengthsingle-gratingnanometermeasurementArticle·June2011CITATIONS25authors,including:ShuhuaYanNationalUniversityofDefenseTechnology69PUBLICA

2、TIONS142CITATIONSSEEPROFILESomeoftheauthorsofthispublicationarealsoworkingontheserelatedprojects:DiffractiveOpticalElementsViewprojectAllcontentfollowingthispagewasuploadedbyShuhuaYanon06April2018.Theuserhasrequestedenhancementofthedownloadedfile.第40卷第6期红外与激光工程2011年6月Vol.40No.6InfraredandLaserEn

3、gineeringJun.2011双波长单光栅纳米测量中激光器性能非理想的影响王国超，颜树华，周卫红，牛正一，谢学东(国防科学技术大学机电工程与自动化学院，湖南长沙410073)摘要：阐述了双波长单光栅式大量程纳米级位移测量系统的基本原理，并对系统具有的量程大、精度高、稳定性好等特点进行了介绍。由于系统进行的是高精度纳米级的位移测量，必须考虑各种不利因素造成的误差影响，主要分析讨论了双频激光器性能非理想所造成的误差，包括波长不稳定造成的线性误差及椭圆极化偏振所造成的非线性误差。并在理论建模的基础上，导出了相应的误差表达式。最后通过仿真计算，指出波长不稳定造成的线性误差的极限值为2nm，

4、在非正交角为1.1°，渥拉斯顿棱镜的透过率Tx、Ty分别为0.85、1时，椭圆极化偏振所造成的非线性误差极值达到1.54nm，并选取不同的非正交角及Tx、Ty对误差变化规律进行了研究分析。关键词：位移测量；光栅；外差干涉；波长不稳定；非正交角中图分类号：TH744.3文献标志码：A文章编号：1007-2276(2011)06-1119-06Effectofnon-idealperformanceoflasersindual-wavelengthsingle-gratingnanometermeasurementWangGuochao,YanShuhua,ZhouWeihong,NiuZ

5、hengyi,XieXuedong(CollegeofMechatronicalEngineeringandAutomation,NationalUniversityofDefenseTechnology,Changsha410073,China)Abstract:Principlesofthedual-wavelengthsinglegratingnanometerdisplacementmeasurementsystemwerepresented,anditscharacteristicsoflongrange,highprecisionandgoodstabilitywerein

6、troduced.Asaresultofthenano-levelhigh-precisiondisplacementmeasurement,theerrorscausedbyallsortsofadversefactorsmustbetakenintoaccount.Theerrorsduetonon-idealperformanceofthedual-frequencylaserweremainlydiscussedandanalyzed,includinglinearerrorscausedbywavelengthinstabilityandnon-linearerrorscau

7、sedbyellipticpolarizationofthelaser.Onthebasisoftheoreticalmodeling,thecorrespondingerrorformulaswerederivedaswell.Thesimulationresultshowsthatthelimitvalueoflinearerrorscausedbywavelengthinstabilityis2nm,andthelimitvalueofn