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1、Casestudy–linearencodersH-3000-1130-01Renishawscalesfacilitatemicro-machiningresearchSpecialequipmenthasrecentlybeeninstalledattheUniversityofSouthamptonbyIonoptikaLtd.,forresearchintooneofthemostdemandingofapplications;micro-machining.Amongthehighlyspecialisedsuppliersi
2、nvolvedisRenishaw,whoseRG2scaleandRGH25UHVreadheadsprovidethecrucialmeansofpositioningforthenanometricmovementsrequired.Peopleoutsidethisdisciplineoftenfindithardtocomprehendjusthowminutesuchworkis–forexample,Ionoptika’sfullcompanylogocanbeetched20μmwideonatypicalmetalli
3、cscreenmask.Ionoptikahasdesignedandconstructedthisinstrumentalsystembyincorporatingamulti-axisNanomotionsamplestage,suppliedbyHeasonTechnologiesofChichester.Thewholeintegratedmicro-machiningassemblyishousedwithinavacuumcasingandmountedonahigh-stabilityplatform,isolatedfr
4、omallexternalvibrationsAndyBarber,Ionoptikatechnicalmanager,comments“Renishaw’sscaleandreadheadswerespecifiedforthecriticalmeasuring/positioningfunctionsbecausetheyareabletomaintainthenecessaryaccuracy.Theycanalsocopewiththedemandingenvironment-toavoid‘out-gassing’proble
5、ms,theultrahighvacuumconditionsrequiretheentireequipmenttobeperiodically‘baked’attemperaturesofupto120oC.“PerfectlymatchedtopiezoceramicmotorsAninterestingfeatureofthemulti-axis,sub-micronaccuracysamplestageisitsuseofpiezo-ceramic‘standingmotion’motors.“Matchingtheencode
6、rstothesemotorshasprovedveryeffective”claimsMrBarber.Theresultiscontinuoussmoothmotioncombinedwithhighresolution,zerobacklash,andfinepositioningaccuracy,whichistypicalofpiezo-electricdevices.FlexibilityandeaseofintegrationAndyBarberhasnodoubtsthattheRG2linearencodersyste
7、m,with50nmresolution,incorporatestheidealtapescaleforsuchanapplication.“Thetape’sflexibilityhasbeenamplydemonstratedherebythewayithasbeenusedonthepartial-arcaxis.TheRGH25readheadisideal,asitiscompact,robustandcompatiblewiththeUHVenvironment,”hesays.Highrepeatabilityvital
8、Linearmovementsacrosstheworkpiececanbeupto50mm,witharequirementtoreturntofeaturespreviouslyworkedon.The
