背面抛光与钝化多晶硅太阳能电池分析

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1、ABSTRACTABSTRACT：、Mththeincreasingdepletionofnon-renewableenergyrepresentedbythecoal，oil，naturalgas，solarenergyasagreen，clean，inexhaustiblenewenergyattractedmoreandmorepeople’Sattention．Inwhich，Polycrystallinesiliconsolarcellisahighlycommercializedutilizationofsolarenergyproducts．Th

2、efocusofthesolarcellmanufacturersalleventuallyfelltohowtoimprovethephotoelectricconversionefficiencyofthecellsandreducetheproductioncostofthecells．Inthispaper,aseriesofstudiesaredesignedtogiveasuitableprocessplanfromthetechnicalprocessandparameterstomanufactureindustrialPERCsolarcel

3、l．Themaintasksareasfollows：l、InnovativeuseofTMAHsolutionaspolycrystallinesiliconsolarcells’backpolishingandbacksidep-njunctionremovaletchingsolution，andtheuseofanew”emitterSiNmask¨technologyreachedaperfectbackpolishingandp-njunctionremovaletchingeffect．Seriesofexperimentsaremadetoex

4、ploretheoptimalpolishingandbacketchingpreprocessingparameters，aswellastheparametersoftheetchingprocessincludingtheconcentrationoftheTMAHsolution，temperatureofthewaterbath，reactiontimeandtheetchingthickness．Eventuallymadethebackpolishedandetchedpolycrystallinesiliconsolarcellswiththe

5、averageefficiencyO．2％higherthanthetraditionalproductionline．2、Basedonconsideringthecostofindustrialproductionandtheeffectofenhancetheefficiencyofcell，weselect”PECVDpreparedSiONrearpassivationfilm”and’’High—SpeedALDpreparedrearpassivationfilm”madetwokindsofPERCsolarcellsandcomparedth

6、eirrearpassivationeffects．Finallywiththe’’PECVDPreparedSiONrearpassivationfilm”wemadePERCsolareellefficiency0．12％increasecomparedtothetraditionalproductionline，withthe”Hi曲一SpeedALDpreparedrearpassivationfilm”wemadePERCsolarcellefficiencyalmostequaltothetraditionalproductionline．Byan

7、alyzingthedata，verifiedtwofilms’passivationmechanism．Provideatheoreticalandpracticalreferenceforthefutureontherearpolishingandpassivationofsolarcellmanufacturing．KEYWORDS：solarcells；PERCsolarcells；TMAH；etchingthebackofp-njunction；rearpassivationCLASSNO：TM914．4么vii序宏观人类社会的发展，没有任何一个阶段

8、可以离开能源的利用。人类社会的发展体现