蓝宝石衬底上siolt2gt薄膜的制备工艺与性能研究

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1、西北工业大学工学硕士学位论文ABSTRACTSapphirehassuchexcellentpropertiesthatitissuperiortoothercurrentandemergingmaterialsforwindowanddomeapplications.However,thecurrentstatesofproductionandprocessofsapphirearenotverywell.Thec-axiscompressivestrengthofsapphiredecreasesdramaticallyatelevatedtemperature

2、andtheopticaltransmissioncannotsatisfythedemandofapplicationanddesign.Inordertomeettheneedforapplicationsofhigh-speedorhigh-temperature,theanti-reflectiveandprotectivefilmsneedtobepreparedonthesapphiresurface.Silicondioxide(Si02)arepromisinganti-reflectivefilmswithgoodphysical,chemical

3、propertiesandgoodadhesiontosapphire.GreatprogresshasbeenmadeintheresearchesaboutSi02anti-reflectiveandprotectivefilmsoverseas.ButnodomesticworkhasbeendoneonSi02opticalandprotectivefilms.Researchesofthepapermostlyconcentrateondesignandpreparationofanti-reflectiveandprotectivefilmsofSi02

4、onsapphire.What'smore,wehavestudiedthepropertiesofthefilms.TheworkisbaseforSi02usedasanti-reflectiveandprotectivecoatingsonsapphiredome.Themaincontentsandresultsarelistedasfollows:WiththehelpofOPFCADsoftware,anti-reflectiveandprotectivefilmsofSi02andSiO2/Siaredesignedonthesapphiresubst

5、rateandanalysisofstructuresensitivefactorandvariationaredone.TheresultsofdesignexplainthatifSi02filmsdepositedonthesurfacesofsapphiretheaveragetransmitancein3^-51xmwavebandcanexceed97%,whichcanmeettherequirementsofmissiledomeininfraredapplication.Si02filmsarepreparedonsiliconsubstrates

6、inordertogetthefunctionsofthemainexperimentparameterssuchasRFpower,gasflow,vacuumgaspressure,target-substratedistanceandsubstratetemperatureondepositionrateoffilms.Theoptimizedparametersrangesareobtainedbyconsideringfilmsdepositionrate,compositionandstructure.ThedesignedfilmsofSi02andS

7、iO2/Siarepreparedonsampleandhemispheredomeofsapphirebyradiofrequencymagnetronreactivesputeringmethod.Theaveragetransmitanceatawavelengthof3-5pmofsapphirecoatedwithonelayerofSi02antireflectivefilmsontwosidescanreach96.43%.Soastothetransmitance11西北工业大学工学硕十学位论文ofcoatedsapphirecansatisfy