磁控溅射法制备硼薄膜和硼纳米线

《磁控溅射法制备硼薄膜和硼纳米线》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、摘要本文采用磁控溅射法制备硼纳米晶体薄膜和硼纳米非晶薄膜，扫描电子显微镜(SEM)观察这些薄膜的表面形貌，能谱仪(EDS)和选区电子衍射(SAED)表征薄膜的成分，纳米压痕仪(Nanoindentor)测定薄膜的性能；同时，在Au的催化作用下，使用磁控溅射法在硼薄膜上制备晶体硼纳米线，SEM观察纳米线的形貌，EDS、TEM和能量损失谱(EELS)表征了纳米线的成分；最后，系统研究溅射参数对纳米线生长的影响，对纳米线的生长机制也做了相应的研究。不同溅射气压下制备的硼纳米晶体薄膜的表征结果表明，溅射气压的提高有利

2、于薄膜致密化和纳米硬度的提高，但对薄膜的弹性模量的影响不大。不同的基片温度下制备的硼纳米非晶薄膜的表征结果表明，随着基片温度的降低，薄膜上的纳米颗粒逐渐分散，薄膜的弹性模量和纳米硬度也随之降低。最后，对制备的硼纳米线样品进行了研究。研究结果表明，在Au触媒的作用下，生长晶体硼纳米线的临界温度为600℃；提高基片温度和溅射气压，延长溅射时间有利于生长大面积、直径一致的纳米线；纳米线的生长可能由气体一液体一固体(VLS)和气体一团簇一固体(VCS)机制共同控制。关键词磁控溅射；硼；薄膜；纳米线；纳米硬度；弹性模量

3、燕山大学工学硕士学位论文Abstracttnthispaper,crystallineboronfilmsandamorphousboronfilmsweregrownbymagnetronsputtering．Scanningelectronmicroscopy(SEM)equippedwithenergydiffractionspectrum(EDS)isusedtostudythemicrostructureandchemicalcompositionsofthesefilms．Transmission

4、electronmicroscopy(TEM)isemployedfortheselectedareaelectrondiffraction(SAED)，Andnanoindentorisusedtomensuratetheelasticity—modulusandnano—hardness．Boronnanowireswerealsofabricatedbymagnetronsputteringwithgoldcatalyst．SEMisemployedtostudythemicrostructure．ED

5、S／TEM／c】ectronenergylossspectrum(EELS)areusedtodetectthechemicalcompositions．TheeffectofsputteringparametersonthegrowthofnanowiresisstudiedsystemicallyandthegrowthmechanismiSalsodiscussed．Theresultssuggestthatwithincreasingofsputteringpressure，boththedensit

6、yandnano—hardnessofthefilmsareimproved，butpressurehaslittleinfluenceontheelasticity-modulus．Theamorphousboronfilmsdepositedatdifferentsubstratetemperaturesshowthatwiththetemperaturedecreasing，theelasticity—modulusandnano-hardnessdecreasebecauseoftheporosity

7、intheboronfilms．Boronnanowiresonthefilmsareinvestigatedindetail．Itcanbeconcludedthatthecriticaltemperatureforthegrowthofnanowiresis600℃．Alongersputteringtime，ahighersubstratetemperatureandahighersputteringpressurearefavorabletoobtainthecrystallineboronnanow

8、ires．Thegrowthofboronnanowiresisprobablycontrolledbycombinationofvapor-liquid—solid(VLS)andvapor-cluster-solid(vcs)mechanisms．Keywordsmagnetronsputtering；boron；film；nanowires；nano-hardness；elasticity—m