滑动速度对单晶硅在不同接触尺度下磨损的影响

《滑动速度对单晶硅在不同接触尺度下磨损的影响》由会员上传分享，免费在线阅读，更多相关内容在工程资料-天天文库。

1、第49卷第1期机械工程学报Vol.49No.12013年1月JOURNALOFMECHANICALENGINEERINGJan.2013DOI：10.3901/JME.2013.01.108*滑动速度对单晶硅在不同接触尺度下磨损的影响徐相杰余丙军陈磊钱林茂(西南交通大学牵引动力国家重点实验室成都610031)摘要：利用纳米划痕仪和液压伺服磨损试验机研究不同接触尺度下滑动速度对单晶硅磨损性能的影响。结果表明：单晶硅在不同接触尺度条件下表现出不同的损伤特征，同时滑动速度对其损伤有很大影响。微观单点接触条件下，单晶硅在低载下的损伤表现为凸起；速度越高，摩擦诱导的非晶层越薄，形成的凸结构越低。随着载

2、荷增加，当接触压力高于单晶硅的硬度时，单晶硅的损伤逐渐转变为沟槽；滑动速度越高，接触区材料的加工硬化越剧烈，沟槽越浅。宏观多点接触条件下，较低的名义接触压力即会在单晶硅表面产生磨损，磨损过程中同时发生犁沟、疲劳和氧化磨损；滑动速度越高，单晶硅表面裂纹萌生得越多，产生的磨屑越细，磨损量越低。该研究结果有助于单晶硅超光滑表面制造的工艺改进以及硅基微机电系统的摩擦学优化设计。关键词：单晶硅接触尺度滑动速度磨损性能中图分类号：TH117EffectofSlidingVelocityontheWearBehaviorofMonocrystallineSiliconunderVariousContact

3、SizeXUXiangjieYUBingjunCHENLeiQIANLinmao(TractionPowerStatekeyLaboratory,SouthwestJiaotongUniversity,Chengdu610031)Abstract：Theeffectofslidingvelocityonthewearbehaviorofmonocrystallinesiliconundervariouscontactsizeisstudiedbynanoscratchandservohydraulicdynamictestmachine.Itisfoundthatboththecontact

4、sizeandslidingvelocityplayedsignificantrolesinthefriction-inducedsurfacedamageofsilicon.Whenthecontactsizeissmallenoughtobeconsideredassingle-asperitycontact,thesurfacedamageofsiliconexhibitedtheformationofhillockunderlowload.Withtheincreaseintheslidingvelocity,thefriction-inducedamorphouslayerbeca

5、methinnerandtheheightofhillockislower.Asthecontactpressureincreasedabovethehardnessofsilicon,thesurfacedamageofsiliconisidentifiedasthegenerationofgroove.Thehigheroftheslidingvelocity,thestrongerthework-hardeningofthecontactarea,andtheshallowerthegroove.Asacomparison,whenthecontactsizeislargeenough

6、tobeconsideredasmulti-asperitycontact,thesiliconsurfacemaybeworneventhoughthecontactpressureismuchlowerthanthehardnessofsilicon.Duringthewearprocess,bothplough,fatigueandoxidationwearoccurresimultaneously.Withtheincreaseintheslidingvelocity,morecracksareinitiated,tinierweardebrisisgenerated,andless

7、wearvolumeisobserved.Theresultsmaynotonlyhelptheimprovementofthenanofabricationtechniqueofsilicon,butalsooptimizethetribologicaldesignofmicroelectromechanicalsystem.Keywords：MonocrystallinesiliconContactsiz