vo22fnb3asrtio3异质结的电学性质与纳米团簇对vo2薄膜光电性质影响的研究

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1、北京交面^学硕±学位镕女ABSTRACTABSTRACT：Va．nadiumdioxide(V02)isa§olid-statematerial，whenthe他mp亡r舢erisesto68℃thereversibletransformationfromnon-metalphasetometalphasewillhappenV02phasetransitionisaccompaniedbyreversiblemutationofthemateriallsresistance，magneticsuscepti

2、bility,andlighttransmittanceThephasetransitiontemperaturecanbeloweredtonearroomtemperaturebydoping，therefore，V02iswide。vappliedinmanyfieldsOnonehand，V02andothersemiconductormaterialscanbeusedtoprepareheterojunctionphotoelectricdetectors，photovoltaiccellsand

3、otheroptuelectzonicdevices；theotherhand，thedirectpreparationofV02thinfilmsonthesubstratecanbeappliedtothedevelopmentofthesmartglassandlaserprotectivedevicesThekeyoflarge—scaleapplicationofV02thinfilmsishowtoreducethephasetransitiontemperaturetoroomtemperatu

4、reandwithouttheinfluenceonthemutationamplitudeoftheopticalandelectricalproper【iesAmongseveralmethods，dopingisaneffectivemethodBaseoiltheformerexperienceontheissueandrelatedliterature，wemainlystudyontheopticalandelectricalpropertiesofV02thinfilmswhichisdoped

5、bythemeanofnanoclustersinthispaper．ThedopingofV02thinfilmisaclljevedbypreparingnanoclustersstructure，whichtakeadvantageofthewayofsurfacetensionself-assemblinginnanosphereslithographyAndthenweriseRFmagnetronspuneringtechniqueforthinfilmdepositionBythoseproce

6、dures，wepreparedtwokindsV02filmcontainingnanochistersstructureoneofthemisnotdoped，theotherisdopedbyPtInthispapertheoptimizedconditionforpreparingV02filmsissummarized，andtheoptical·electricalpropertiesofthosefilmsarethefocusofmyresearchStudieshaveshownthatth

7、eresistancemutationrateofnon-dopedV02thinfilmscontainingnanoclustersstructm'ecallreach818％．themutationrateofopticaltransmissionisabletobe15％atwavelengthof1100nm，thephasetransitiontemperatureisbetween56-72'CAtthesfl／／letime．theresistancemutationrateofV02thin

8、filmsPtnanochistersdopingisupto667％．themutationrateofopticaltransmissionearlreach7％atwavalengthof1100nmthephasetransitiontemperature北京交通大学硕±学《*女isbetween38·58℃ComparingwiththeconventionalV02thinfilms，w