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1、ProceedingsoftheIMechE,PartC:JournalofMechanicalEngineeringScience,Vol.221,2007,pp.259-266AninvestigationofnanoindentationtestsonthesinglecrystalcopperthinfilmviaanAFMandMDsimulation1*21DehongHuo,YingchunLiang,KaiCheng1SchoolofEngineeringandDesign,BrunelUniversity,Uxbridge,Middlesex,
2、UB83PH,UK2PrecisionEngineeringResearchInstitute,HarbinInstituteofTechnology,Harbin150001,ChinaAbstract:Nanoindentationtestsperformedinanatomicforcemicroscopehavebeenutilizedtodirectlymeasurethemechanicalpropertiesofsinglecrystalmetalthinfilmsfabricatedbythevacuumvapordepositiontechni
3、que.Nanoindentationtestswereconductedatvariousindentationdepthstostudytheeffectofindentationdepthsonthemechanicalpropertiesofthinfilms.TheresultswereinterpretedbyusingtheOliver-Pharrmethodwithwhichdirectobservationandmeasurementofthecontactareaarenotrequired.Theelasticmodulusofthesin
4、glecrystalcopperfilmatvariousindentationdepthswasdeterminedas67.0±6.9GPaonaveragewhichisinreasonableagreementwiththeresultsreportedbyothers.Theindentationhardnessconstantlyincreaseswithdecreasingindentationdepth,indicatingastrongsizeeffect.Inadditiontotheexperimentalwork,athree-dimen
5、sionalnanoindentationmodelofmoleculardynamics(MD)simulationswithembeddedatommethod(EAM)potentialisproposedtoelucidatethemechanicsandmechanismsofnanoindentationofthinfilmsfromtheatomisticpointofview.MDsimulationsresultsalsoshowthatduetothesizeeffecttheplasticdeformationviaamorphoustra
6、nsformationismorefavorablethanviathegenerationandpropagationofdislocationsinnanoindentationofsinglecrystalcopperthinfilms.Keywords:Mechanicalproperties,Thinfilm,Nanoindentation,Atomicforcemicroscope,Moleculardynamics1ProceedingsoftheIMechE,PartC:JournalofMechanicalEngineeringScience,
7、Vol.221,2007,pp.259-2661INTRODUCTIONThinfilmmaterialshavebeenwidelyemployedinmanyfieldssuchasmicroelectronics,micro-electro-mechanicalsystems,opticaldevicesandmagneticstorageequipment[1-6].Theirmechanicalproperties,whichmightdifferfromthoseofbulkmaterialswiththesamecomposition,haveav
8、italeffecton