irem在超密度管脚正面封装芯片上的失效分析应用

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1、关键词：失效分析，样品制备，红外发射显微镜，TN406可靠性及例行试验4AbstractWiththetrendofelectricproductsmicrominiaturized．chipmademoreandmorecomplex，densityofthecircuitgothigherandnumberofmetallayersbecamemore，packagetechniquesarebeingdevelopedaimingatsmallersize，higherintegratedensityandbettercost．Dividedbyth

2、elocationofthechipinthepackage，therearechipfront—sidepackageandchipbacksidepackage：dividedbythenumberofpackagepins，therearehighdensitypackageandlowdensitypackage．Failureanalysisisaactivitytoanalyzethefailedsampleforrootcauseinordertohelpdesignerandmanufacturingtoimprovetheprocess．

3、Faultisolationisakeysteptothesuccessofthewholefailureanalysisasit’stheinterconnectionbetweendestructiveanalysismethodsandnon-destructiveanalysismethods．IREM，asthekeymachineforfaultisolation，dependsonitssamplepreparationsuccessratetoresultinagoodfaultisolationsuccessrate．Thecurrent

4、maturesamplepreparationmethodofIREM(InfraredEmissionMicroscope)caneasilylocalizethefailuresitebycapturingtheemitphotonsgeneratedfromthefailuresitepassingthroughthesiliconsubstrateforthebacksidepackagedchipifitisinfunction．Howeverthismethodisnotapplicabletofront—sidepackagedchip．Th

5、ephotongeneratedfromthefailuresitecanbarelypassthroughthefront—sideofthechipbecausethosephotonsarealmostblockedbythehighdensityofthemetallayers．Thedisabi1itymakesthefutureanalysisalotofdifficulties．ThroughtheindustryrecentlymadesomebreakthrouIghontheIREWsamplepreparationforthelowd

6、ensityfront—sidepackagedchip，itisstilladarkforhighdensityfront—sidepackagedchip．ThisarticleprovidesanovelIREMsamplepreparationmethodforthehighdensityfront—sidepackagedchip．ThistechniqueextendstheapplicationofIREMtohighdensityfront—sitepackagedchipsbydesigningnewsmallfixtures，optim

7、izingthesettingsofdifferentequipments，creativelyincludingtheauto—bondingmachinefromHVM(highvolumemanufacturing)intofailureanalysisandsynergizingdeball，half-waypolish，repackage，point—to-pointrebonding，moldingandfinepolishtogether．Itmakesthefurtheranalysispossibleafterremovingtheroa

8、d-blockWiththis，IREMcannotonlywor