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ID:32354718
大小:1.36 MB
页数:49页
时间:2019-02-03
《irem在超密度管脚正面封装芯片上的失效分析应用》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、关键词:失效分析,样品制备,红外发射显微镜,TN406可靠性及例行试验4AbstractWiththetrendofelectricproductsmicrominiaturized.chipmademoreandmorecomplex,densityofthecircuitgothigherandnumberofmetallayersbecamemore,packagetechniquesarebeingdevelopedaimingatsmallersize,higherintegratedensityandbettercost.Dividedbyth
2、elocationofthechipinthepackage,therearechipfront—sidepackageandchipbacksidepackage:dividedbythenumberofpackagepins,therearehighdensitypackageandlowdensitypackage.Failureanalysisisaactivitytoanalyzethefailedsampleforrootcauseinordertohelpdesignerandmanufacturingtoimprovetheprocess.
3、Faultisolationisakeysteptothesuccessofthewholefailureanalysisasit’stheinterconnectionbetweendestructiveanalysismethodsandnon-destructiveanalysismethods.IREM,asthekeymachineforfaultisolation,dependsonitssamplepreparationsuccessratetoresultinagoodfaultisolationsuccessrate.Thecurrent
4、maturesamplepreparationmethodofIREM(InfraredEmissionMicroscope)caneasilylocalizethefailuresitebycapturingtheemitphotonsgeneratedfromthefailuresitepassingthroughthesiliconsubstrateforthebacksidepackagedchipifitisinfunction.Howeverthismethodisnotapplicabletofront—sidepackagedchip.Th
5、ephotongeneratedfromthefailuresitecanbarelypassthroughthefront—sideofthechipbecausethosephotonsarealmostblockedbythehighdensityofthemetallayers.Thedisabi1itymakesthefutureanalysisalotofdifficulties.ThroughtheindustryrecentlymadesomebreakthrouIghontheIREWsamplepreparationforthelowd
6、ensityfront—sidepackagedchip,itisstilladarkforhighdensityfront—sidepackagedchip.ThisarticleprovidesanovelIREMsamplepreparationmethodforthehighdensityfront—sidepackagedchip.ThistechniqueextendstheapplicationofIREMtohighdensityfront—sitepackagedchipsbydesigningnewsmallfixtures,optim
7、izingthesettingsofdifferentequipments,creativelyincludingtheauto—bondingmachinefromHVM(highvolumemanufacturing)intofailureanalysisandsynergizingdeball,half-waypolish,repackage,point—to-pointrebonding,moldingandfinepolishtogether.Itmakesthefurtheranalysispossibleafterremovingtheroa
8、d-blockWiththis,IREMcannotonlywor
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