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1、AbstractAbstractMicro/nanomanufacturingtechnologyasanimportantsymbolofacountryintermsofmanufacturinglevel,ithasbeenusedinnationaldefense,industrialcontrol,precisionmanufacturing,electronicsmanufacturing,optical,information,medical,aviationandotherfields.Italsoplaysanimportan
2、troleattheaspectofpushingforwardscientificandtechnologicalprogress,promotingindustrialdevelopmenteconomicgrowthandsafeguardnationalsecurity.Micro/nanomechanismincludesmicro/nanodevicesandmechanisms.Ingeneral,compliantmechanismsalsoexistssmallstiffness,smallcarryingcapacityat
3、theaspectofmicro/nano.Theflexibleparallelmechanismcombinesthecharacteristicsofparallelandflexiblemechanism.Itmakesuptheflexiblemechanism’ssmallstiffness,smallcarryingcapacity.Atpresenttheresearchanddesignofflexibleparallelmechanismonlycombineflexibilityandparallelasexperienc
4、eanditisaformoffusionofthetwointoabody.Theflexibleparallelmechanismsstructurealsoincludesthehinged.Thereforescientificreasonableandsimple,practicalandinnovativedesignmethodandtheoryapplyingtothedesignofthecompliantparallelmechanismwithnohingesisanurgentthing.Thispapertakesth
5、eplanartwodegreeoffreedomandthreedegreeoffreedomfullcompliantparallelmechanismastheresearchobject.Basedonthepseudorigidbodymethodandtopologyoptimizationmethodsfordesignofthetwokindsofmechanism,andusethefiniteelementsoftwaretosimulatethesameplanarconfigurationrespectively,val
6、idatethetopologyoptimizationtheoryapplyingtotheconfigurationdesignofplanefullcompliantparallelmechanismisscientific,simpleandeffective.Theresearchworksasfollows:（1）Taketheplanartwodegreeoffreedom（twotranslation）parallelmechanismasthebody,firstlydomicrokinematicsanalysisforth
7、ebodywiththedesignmethodofpseudorigidbodytodesigntheflexibleparallelmechanism,secondlyintroduceanewtopologyoptimizationtodesignthesameconfigurationfullycompliantparallelmechanism,finallyconductthefiniteelementsoftwaresimulationanalysis.Thedesignedresultveritiesthesimplicitye
8、ffectivenessandscientificofthetopologyoptimizationdesignmethod.（2）Takethe3-
