高电荷态离子与固体表面相互作用机理研究毕业论

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1、兰州大学博：l：研究生学位论义并结合实验结果，讨论了表面的电子激发对势能溅射过程的可能贡献。利用高电荷态Xeq+离子入射到云母材料表面，通过原子力显微镜(AFM)观察到了表面的丘状纳米突起，初步建立了表面纳米缺陷直径及高度与入射离了势能和动能的关系。估算了形成此种纳米缺陷对应的移位原子数。同时介绍了在方向上最新的实验研究结果。在高电荷态Xeq+(q=5～26)离子辐照高定向石墨(HighlyOrientedPyrolyticGraphite，HOPG)表面的实验中，利用Raman光谱和XPS(X．rayPhotoelectricSpectros

2、copy)测量，观测到了石墨表面结构由sp2向sp3杂化的现象，表明在石擞表面有类金刚石结构的生成。讨论了此转化过程与入射离子势能和入射剂量间的关系。通过改变入射离子动能，发现对于速度较慢的离__f，它能将更大比例的势能沉积到材料表面区域，从而更加有效地在石墨表面产生类金刚石结构。关键词：高电荷态离子，势能溅射，阈值效应，能损增强，表面纳米缺陷，类金刚石结构，金属，云母，高定向石墨¨兰州大学博‘l：研究牛学位论文AbstractHighlyChargedIon(HCI)istheioninhighchargestate，whichisprodu

3、cedbythetossofmostoralloftheatom’Sboundedelectrons．ThemostoutstandingfeatureisthegreatamountofpotentialenergycarriedbyHCI．ThestudyontheinteractionofHCIandmaterialattractsgreatinterestsinastrophysics，atomicphysics，radiationbiology,nano—materialandthedesignoffusionreactor．Duet

4、otheuniquepropertyofHCI，ithastheveryspecialapplicationinsurfaceanalysisandsurfacemodificationatthenanoscale，thustheHCIhasbeenexpectedasanewgenerationtoolforthemicroelectronicengineering．Additionally,HCIisthefavoritecandidateinmedicalapplicationofheavyioncancertherapysincethe

5、specialinteractionbetweenthewell-acceleratedHCIandorganics．Inthisthesis，weintroduced：thespecialpropertiesofHCI；theHCIsourcefacilitiese．g．ElectronCyclotronResonanceIonSource(ECRIS)andElectronBeamIonTrap(EBIT)；aswellastheproposedtheorymodelsandtheexperimentalresultsinthisstudy

6、field．Inourwork,thestudiesofsputteringproducedbyHCIinteractionwithvarioussolidsurfaceswerereportedfirst．Theworkabouthillock—likenanodefectinducedbybombardmentofHCIonmicasurfacewasalsointroduced．Last，theinvestigationonthediamond—likecarbonproductionbyimpactingofHClonHOPGsurfa

7、cewaspresented．OnthestudyofsputteringinducedbyHCI，thehighlychargedArq+(q=l-16)，Pb9+(q=4~36)ionswithvariouskineticenergieswereemployedtoimpactonthekindsoftargets，includingthemetals：gold(Au)，copper(Cu)，aluminum(AI)，niobiumfNb)，molybdenum(Mo)，tantalum(Ta)；thesemiconductor：N-typ

8、esilicon(Si)；theinsulator：silicondioxide(si02)．UsingaMCPdetector,thesputter