半导体行业对外测试设备介绍.doc

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1、SSM2000SRP介绍Thespreadingresistancetechniqueisamethodformeasuringtheelectricalpropertiesofsemiconductormaterialswithveryhighspatialresolution;itisbasedonmeasurementsofthecontactresistanceofspeciallypreparedpointcontactsondopedsiliconsamples.TheSSM2000NANOSRP®Systemisanautom

2、atedspreadingresistanceprobedesignedtocharacterizetheelectricalpropertiesofdopedsiliconmaterials.Thissystemgeneratesprofilesofresistivity,carrierdensity,andelectricallyactivedopantdensitymorequicklyandmoreeasilythanitspredecessor,theSSM150.ItisthemostadvancedSRPtestmachine

3、inworld.Silancharacteristic1、Canaffordthebestaccuracyresultforcustom.2、WehavetheuniqueabilitytotesttheUltrashallowlayer.Examplewecantestimplantresistivityprofileronsurface.Wecanguarantee6nmresolutionfortestUltrashallowlayer.3、Canmeasuretheresistivityofpatternedsamples(dime

4、nsionofpatternabove80um).扩展电阻率测试是用高分辨率测试半导体材料的电特性。它基于被测样片上接触的探针来测试。SSM2000是一台自动的用扩展电阻的方法来反应参杂硅材料电特性的机器。它能产生整个硅片电阻率的轮廓特性，载流子浓度，参杂浓度。它比国内常用的SSM150要快速，准确许多。是目前世界最先进的SRP测试设备之一。士兰特点：1、能给用户提供国内最精确的测试结果。2、是国内唯一有能力准确测试浅层结构，如注入表层电阻率的变化特性。能保证6nm的分辨率准确性。3、能测试图形中样品的扩展电阻率（图形尺寸80um以上）。S

5、SM495C-V测试仪TheSSM495isanautomaticmercuryprobecapacitance-voltage(CV)measuringsystem.TheSSM495hasanadvancedmeasurementtoolwithmanycharacteristicssuchasgoodspatialresolution,goodsensitivityandnon-destructive.TheresistivityofallkindsepisamplescanbeaccuratelymeasuredusingSSM49

6、5.Themeasurementrangeisfrom0.1to100Ω.cminn-typewafer;from0.24to330Ω.cminP-typewafers.TheSSM495canalsobeusedtomonitoroxidequality(Thresholdvoltage:Vth;Flatbandvoltage:Vfb;Oxidecapacitance:Cox;Effectiveoxidecharge:Neff).Inaddition,itcanoffergoodresolutioninmonitoringtheimpla

7、ntdoseofB,PorAsinthechannelregionunderthegate.SILANCharacteristicWecantestmostofPtypeEPIwaferwhichisveryhardformanycompaniessometimes.SSM495全自动汞探针CV测试系统是先进的测试工具，具有空间分辨率高、灵敏度好、非破坏性等特点。它能精确地测试各种外延片的电阻率。N型硅片的测试范围为：0.1～100Ω.cm；P型硅片的测试范围为：0.24～330Ω.cm。SSM495亦可用于监测氧化层质量（阀值电压Vth；

8、平带电压Vfb；氧化层电容Cox;氧化层电荷数Neff）。此外，对于栅极下面沟道区的B、P、As注入剂量，SSM495能提供完美的监测方案。士兰特点：对于P型外延片电阻率的测试一