哈工大-sem实验报告

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1、《先进材料表征技术》课程实验名称：扫描电镜与能谱仪的原理及松用姓名：实验吋间：2015年11月6日哈尔滨工业大学深圳研宄生院I.Purpose1.Befamiliarwiththestructureandprincipleofscanningelectronmicroscope.2.Befamiliarwiththerequirementofsamplepreparation.3.KnowabouttheoperationspecificationofSEM，befamiliarwiththedifferences《先进材料表征技术》课程实验名称：扫描电镜与能谱仪的原理

2、及松用姓名：实验吋间：2015年11月6日哈尔滨工业大学深圳研宄生院I.Purpose1.Befamiliarwiththestructureandprincipleofscanningelectronmicroscope.2.Befamiliarwiththerequirementofsamplepreparation.3.KnowabouttheoperationspecificationofSEM，befamiliarwiththedifferencesbetweenimageofsecondaryelectronandbackscatterelectron.1.

3、KnowabouttheoperationspecificationofEDS，befamiliarwiththepointanalysis,lineanalysisandmapping.ILPrinciples2.1ResolutionandcontrastForimaging,resolutionmeanstheminimumdistancebetweentwodistinctpoints.Forcompositionanalysis,resolutionmeanstheminimumregioncanbeanalyzed.InSEMsystem，resolutio

4、ndependsonthediameteroftheincidentelectronbeamandsignaltype.Contrastmeansthedifferenceofbrightness，anditcanbecausedbymorphologyoratomicnumber.ThemorphologycontrastisalwaysobservedinSEimage，andtheatomiccontrastisalwaysobservedinBSEimage.2.2ElectronmicroscopyimagingThebeamemittedfromtheele

5、ctrongunisfocusedatthesurfaceofthesamplethroughaseriesofelectromagneticlens(Fig1.).Thelastlensequippedwithascanningcoilcandriveelectronbeamscanonthesurface.Theinteractionbetweenhighenergyelectronbeamandsamplegeneratevarioussignals，andthesignalscanbereceivedbythedetector.Dothispointbypoin

6、tandwecangetaimage(Fig2.).屯子枪阳级第一聚光枝聚光俛光阑其二聚先忮物键光闭扫楣残困物铁试样Figi.ElectrongunFig2.thescanningprocesstoformaimage2.1SEimageandBSEimageSecondaryelectronsignalaregeneratedfromtheverysurface(Fig3.)，sotheintensityofthesignalsensitivetotheorientationoftheincidentbeam.Alongangleformedbysurfaceandi

7、ncidentbeamincreases，thesecondaryelectronyieldincrease.Therefore,theSEimageissuitablefordisplaythemorphologycontrast.FromFig2.wecanseethatbackscatterelectronisgeneratedfromarelativebigvolumeneartothesurface，sotheimagehaspoorerresolution.TheBSEyieldissensitivetotheatomicnu