tan-基纳米复合膜和多层膜的微结构及性能分析

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1、江苏科技大学工学硕士学位论文temperatureswerelowerthanthefrictioncoefficientsofTaNfilmatroomandhightemperatures,andthereasonsaredetailedanalyzedbasedonthemorphologyandcontentofweartracksformedatdifferenttemperatures.ThestudyonTaN/VNmultilayerfilmsshowedthatwithmodulationper

2、iod(Λ)increasing,thecrystalstructuresofTaN/VNmultilayersweresimilartothatofthesingle-layerTaNfilmandthehardnessandaveragefrictioncoefficientofmulitlayersdecreased.Themaximumhardnessof31.8GPawasobtainedforthemultilayerwithaΛof0.67nm.Theaveragefrictioncoefficie

3、ntwaslowandthewearresistancewasimprovedforthemultilayerscomparedwithTaN,VNmonolayerfilms.Thelowest-73-1-1frictioncoefficientandwearratewere0.43and5.61×10mmNm,respectively,whenΛwas24nm,whichiscontributedtotheformationofV2O5byareactionbetweenthecoatingsurfacean

4、doxygen/moistureintheair.KeyWords:TaNmonolayerfilms;TaVNcompositefilms;TaMoNcompositefilms;TaN/VNmultilayerfilms;microstructure;mechanicalproperties;frictionandwearpropertiesIV目录目录摘要………………………………………………………………………………………ⅠAbstract………………………………………………………………………………Ⅲ第1章绪

5、论.................................................................................................................11.1引言.....................................................................................................................11.2纳米复合膜.............

6、............................................................................................21.2.1纳米复合膜研究现状与进展.......................................................................21.2.2纳米复合膜的致硬机理..............................................................

7、.................31.3纳米多层膜.........................................................................................................41.3.1纳米多层膜的研究现状与进展...................................................................41.3.2纳米多层膜的超硬机理..........................

8、.....................................................41.4薄膜的摩擦磨损性能研究.................................................................................61.4.1摩擦..............................