硕士论文-固相外延cosi2薄膜技术在深亚微米cmos器件上的应用研究

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1、复旦大学;r程硕士学位论文Y952459学校代码：10246学号：033021101硕士学位论文(专业学位）复旦大学;r程硕士学位论文Q相外政CoSi2緣JBiiULft深JMBL米CMOS«^上的產用所走院系（所）：信息科学与工程学院专业.电子与通信工程■姓名：陆杰指导教师药国平教授：完成曰期2005年11月11日••ABSTRACTItiswellknownthatcontactandinterconnectionofself-alignedCoSizS/DandgateISoneofthekeyprocesstechnologiesofsub--0.25mCMOSde

2、viceandcircuitfabrication.Recently,heteroepitaxialCoSis,preparedbyinterlayermediatedsolidphaseepitaxy(IMSPE)technology,shovssuperiorelectricalcharacteristicsandthermalstability,cofflparedwithconventionalpolyCoSij.Especiallytitaniuminterlayermediatedepitaxy(TIME)isconsideredtobequitecompati

3、blewithcurrentCMOSprocess,whichalsocanbeself-alignedtoformepitaxialsilicidecontactandinterconnectioninthesource/drain(S/D)andgatearea.SoTIMEtechnologyisverypromisinginapplicationfordeepsub-microndevicefabrication.Inthisthesis,twotopicsrelatedtotheepitaxyofCoSijanditsapplicationarestudied.O

4、neIsCo/Ti/SimultilayersolidphasereactionwithTiNcappingandthepropertiesoftheepitaxialCoSUfilm.TheotheristheapplicationofTIMEtechnologyintestwafersat0.18Wnbaselineandevaluatingitsfeasibilityinsub-0.25MmCMOSfabrication.复旦大学;r程硕士学位论文MultilayerstructureofCo/Ti/SiisusedtoformtheepitaxialCoSU.The

5、structureandcompositionofsilicidefilm,interfacebetweenCoSijandSisubstrate,epitaxydualityofCoSizfilm,thermalstabilityandself-alignedprocesswindowareinvestigatedbymeansoffourpointprobe(FPP),X^raydiffraction(XRD),scanningelectronmicroscopy(SEM)andcrosssectionaltransmissionelectronmicroscopy(T

6、EM).TheroleofTiasinterlayerlayerduringtheepitaxialgrowthofCoS“isalsoanalyzedandrevealedbycomparingCoSiithinfilmswhichareformedbythereactionofCo/SiandCo/Ti/Sisystemsrespectively-Mainexperimentalresultsarelistedbelow:(1)TheinterfaceformedbyTIMEbetweenCoSi2andSisubstrateisverysmooth;(2)Thefil

7、mshowsgoodepitaxialqualitywithproperprocessconditions;(3)TheepitaxialCoSijfilmshowsgoodthermalstability,anditcanremainlowresistivityafterannealingattemperatureuptollOO'C.Experimentsontestwaferswith0-18Mmbaselineprocessaredoneinproductlineaccordingtocentralcond