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1、FabricationtechniquesoflithiumniobatewaveguidesM.N.Armenise(IEEEProceedings,Vol.135,No.2,1988,pp85–89)Abstract–Inthepaper,themostcommonlyusedfabricationtechniquesofopticalwaveguidesinlithiumniobatearereviewed.Diffusionprocessessuchasout-diffusionoflithiumoxidefromthecrys
2、talsurface,in-diffusionofmetals,ionexchangeandprotonexchange,andionimplantationareanalyzed.ThecharacteristicsofLiNbO3opticalwaveguidespreparedbythedifferenttechnologicalproceduresarereportedinrelationwiththefabricationconditions.Highqualityopticalwaveguidesonlithiumnioba
3、tecanbeproducedbyTiin-diffusioninadryO2atmosphereattemperaturesabove1000℃forlongdiffusiontimes(>10h).However,despitethelargeamountofresearchdoneinthisfield,correlationsbetweenopticalpropertiesandstructuralcharacteristicshavenotyetbeenestablished.IntroductionDespitethemos
4、trecentadvancesinoptoelectronictechnology,theintegrationofopticalandelectricaldevicesonasinglechipconstitutesanunachievedtarget.Moreover,therearemanyapplicationsinwhichmonolithicintegrationisnotnecessary.Significantworkinhybridintegrationhasbeendone,andvariousopticalcomp
5、onentsandcircuitssuchascouplers,modulators,filters,lenses,correlators,andspectrumanalyzershavebeendevelopedinthinfilmform.Thedesignofguided-wavedevicesorsystemsdependsstrictlyonthepossibilityofobtainingthebestelectromagneticwaveconfinementandpropagationconditionsbycontro
6、llingthewaveguideopticalpropertiesandgeometricalconfiguration.Althoughmostofthepastworkinintegratedoptoelectronicswasdevotedtosolvingelectromagneticproblemsandtodevelopingindividualdevices,aconsiderableamountofworkhasbeendonerecentlyonunderstandingthebasicphysicsofguided
7、-wavedevicestoleadtoimprovedperformancesandhigherreliability.Theessentialelementofadeviceistheopticalwaveguidewhichconsistsofathinlayeronamaterialsubstrate.Therefractiveindexofthethinlayerisgreaterthanthatofthesubstrate.Awiderangeofmaterialhasbeenusedforthinfilmopticalde
8、vicesandcircuits.Activedevicessuchasswitches,deflectorsandmodulatorshavebeenformedinelectro-opticalorac
