MEMS光纤法珀压力传感器的设计及解调方法实现.pdf

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1、第28卷第8期传感技术学报V01．28NO．82015年8月CHINESEJOURNALOFSENSORSANDACTUATORSAug．2015DesignofMEMSOpticalFiberPressureSensorandDemodulationMethodImplementationCAOQun，JIAPinggang，XIONGl，一，ZHANGHairui，HONGYingping一。FANGGuocheng，(1．ScienceandTechnologyonElectronicTest

2、&MeasurementLaboratory，NorthUniversityofChina，Taiyuan030051，China；2．KeyLaboratoryInstrumentationScience&DynamicMeasurement，MinistryofEducation，NorthUniversityofChina，Taiyuan030051，China)Abstract：AkindofMEMSopticalfiberFabry-Perotpressuresensorwaspropos

3、edbasedonthepressuresensingprinciplewhichduetothechangeofcavitylengthcausedbythedeformationofsensitivediaphragmwhenpressureaDplied．Thesens0r’stheoreticalmodelbetweensensitivediaphragmdeflectionvariationwithfilmthickness，radiusandloadingpressurewasestab

4、lished．0nthebasis，thetwo—dimensionalsimulationusingMATLABandthree—dimensionalnumericalsimulationbyComsolMuhiphysicssoftwarewasperformedandtheprocessingfabricationofFPpressuresensingpartwasrealizedaswel1．Thusthedemodulationmethodwhichcanbeappliedtotheop

5、ticalfibersensingwasdesignedandrelatedexperimentsweretakenonaftertheimplementationofopticalfibersensingpressuretestingsystem．Byemployingthedesigneddemodulationmethod．thesensor’sperformanceandcharacteristicscanbetestedandverified．Theexpe．rimentalresults

6、indicatethatthelinearityofsensor’smeasuredcurveisgoodandbroadlyconsistentwiththereSUItsofnumericalsimulation，thesensitivityunder100kPaisabout62．3nm／kPawithatemperaturesensitivitycoeficientof0．023m／℃，themeasuredresolutionandprecisionare1．29kPaand3．93％re

7、spectivelythatconfirmedthemethodofMEMSopticalfiberpressuresensingsystemperformsapotentialpossibility．Keywords：opticalfibersensing；Fabry—Perotcavity；MEMSprocessing；demodulationmethod；MATLAB；ComsolMultiphysicsEEACC：2560；2575D；2575F；4190doi：10．39690．issn．

8、1004—1699．2015．08．008MEMS光纤法珀压力传感器的设计及解调方法实现曹群，贾平岗，熊继军，张海瑞，洪应平，房国成，(1．中北大学电子测试技术国家重点实验室，太原030051；2．中北大学仪器科学与动态测试教育部重点实验室，太原030051)摘要：基于外界压力引起敏感膜片形变导致腔长变化来实现压力信号传感的原理，提出了一种MEMS光纤法珀压力传感器的设计，建立了传感器敏感膜片的挠度变化与膜厚、半径及施加压力的关系理论模型，并在此基础上进行了膜片的MA