光纤法布里—珀罗MEMS压力传感器的研究

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1、南京师范大学博士学位论文光纤法布里—珀罗MEMS压力传感器的研究姓名：葛益娴申请学位级别：博士专业：物理电子学指导教师：王鸣20090524AbstractIndustryproductionandnationaldefenserequireamassofmicrosensorswhichhavethecharacteristicsofmultifunction，hi曲sensitivityandbatchproduction．Micro-Electro-MechanicalSystems(MEMS)sensorandfibersensorarealsothe

2、hotareasofresearchatpresent．OpticalfiberMEMSsensorhavetheadvantagesofbothMEMSSensorandthefiberSeg．SOFwhichhasthepropertiesoflargebandwidlh,hi薛sensitivity,largerangeofdynamictestsandhasaconfigurationthatcarlbereadilyincorporatedintosensorarrays．TheopticMEMSsensorwestudiedisanimprovem

3、entQfthepresentpressureSeBSOLItmaysolvetheproblemsofmicrominiaturizationandbatchproductionandbeabletosurviveinharshenvironmentssuchaselectromagneticinterferenceandflammability．Itmayhaveagoodprospectinpetrochemicalindustryandaviation．AkindofopticalfiberMEMSpressuresensorbasedonphased

4、emodulationisdesignedandfabricated．TheopticalfiberMEMSpressuresensorisdesignedbytheoreticalanalysisandnumericalsimulation．TheimpactofthesensorparametersOffperformanceisdiscussedandoptimized．AuniqueconfigurationofSi-Glass-Fibermicrocavityispresented，whichutilizesthecommercialfiberand

5、flange．Thedemodulationsystemofthesensorissetup。AphasedemodulationmethodbasedOffaFouriertransformationisexploredExperimentalresultsdemonstratethatthesensorhasreasonableperformance，AnopticalMEMSpressuresensorbasedonamesa-diaphragmispresented．Themechanicalmodelofthesensorisfoundandmaxi

6、umdeflectionofthemembraneisdeduced．Thesignalaveragingeffectofthemesadiaphragmisvalidatedbysimulation,andiscomparedwiththeplanaroneolltheparallelism。Fabricationprocessofthesensoris‘introduced,especiallythedoublealignmentinthephotolithography．Experimentalresultsdemonstratethatthesenso

7、rhasareasonablelinearityandsensitivity．AkindofminiatureFabry-PerotfiberopticalpressuresensorbasedonfiberⅡAbstractetchingtechnologyhasbeendeveloped．Its址1-silicastructureh硒goodstabilityforlong-termuse．Inaddition,itiscabinet,simpleforfabricationandIOWcost．Thesensitivityandresolutionare

8、discussed．Thefabric