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1、SensorsandActuatorsB118(2006)198203Characterizationofmetal-oxidenanosensorsfabricatedwithfocusedionbeam(FIB)F.Hernandez-Ram´´ıreza,∗,J.Rodr´ıgueza,O.Casalsa,E.Russinyola,A.Vila`a,A.Romano-Rodr´ıgueza,J.R.Morantea,M.AbidbaEME/CErMAE/CEMIC,Departamentd’
2、Electr`onica,UniversitatdeBarcelonaUB,C/Mart´ıiFranqu´es1,E-08028Barcelona,SpainbLaboratoiredePhysiquedesMat´eriauxNanostructur´es,EcolePolytechniqueF´´ed´eraledeLausanne,EPFL,CH-1015Lausanne,SwitzerlandAvailableonline23May2006AbstractAproceduretocont
3、actsinglemetal-oxidenanowiresandnanoparticlesofdifferentmaterialsusingaDualBeamFIBhasbeendeveloped.Thequalityoftheelectricalcontactshasbeenevaluatedandthepossibilityofextractingtheelectricalparametersofthesenanowiresandnanoparticlesdemonstrated.Theres
4、ponseofsomeofthemtodifferentgasesispresented,provingthefeasibilityoffabricatingmetal-oxidenanosensors.©2006ElsevierB.V.Allrightsreserved.Keywords:Metal-oxide;Gasnanosensors;FIB1.Introductionformingelectron-beaminduceddepositions(EBID)ofdifferentmateri
5、alsbydissociatingmetalorganiccompoundswiththehelpMetal-oxidegasnanosensorspresenthighersensitivitiesandofsecondaryelectrons(SE),havehelpedtoovercomeproblemssmallerrecoverytimesthanconventionalmetal-oxidesensors,relatedtoconventionalFIBlithography[1113
6、].Severalmetal-duetosizereductioneffects.Forthesereasons,metal-oxideoxidenanowiresandnanoparticleshavebeencontacted,andthenanomaterialsarebelievedtobeverypromisinginthedevel-qualityofthecontactsevaluated,demonstratingthepossibilityopmentofanewgenerati
7、onofmetal-oxidesensorswithbetterofusingthisproceduretoperformabetterelectricalcharac-andimprovedproperties[1,2].terizationofnanomaterials.Moreover,theresponseofsomeofObtainingelectricalcontactswithnanometreprecisionthemtothepresenceofdifferentgasesisp
8、resented,provingthatrequirestheuseofaccuratetechniquesabletoovercomeprob-metal-oxidenanosensorscanbeobtainedwiththehelpofDuallemsrelatedtothefabricationinthenanometrerange.Although,BeamFIBlithography,whichcanbeconsideredasanalternativesomenano
