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1、288IEEETRANSACTIONSONCIRCUITSANDSYSTEMSI:REGULARPAPERS,VOL.53,NO.2,FEBRUARY2006AVariable-CapacitanceVibration-to-ElectricEnergyHarvesterBernardC.Yen,StudentMember,IEEE,andJeffreyH.Lang,Fellow,IEEEAbstract—PastresearchonvibrationenergyharvestinghasIronBoron,oracoilofwireontoacantileverbeamthat
2、isvi-focusedprimarilyontheuseofmagnetsorpiezoelectricmate-brationallyactuated;theotherelementremainsfixed[5],[6].Inrialsasthebasisofenergytransduction,withfewexperimentaleitherscenario,thecoilwillcutthroughmagneticfluxasthestudiesimplementingvariable-capacitance-basedscavenging.Incantileverbeam
3、vibrates,creatinganinducedvoltageattheter-contrast,thispaperpresentsthedesignanddemonstrationofavariable-capacitancevibrationenergyharvesterthatcombinesminalsofthecoil.Vibrationenergycanalsobetransducedusinganasynchronousdiode-basedchargepumpwithaninductiveavariableinductor,althoughnosuchstud
4、ieshavebeenreportedenergyflybackcircuittodeliver1.8Wtoaresistiveload.Atodate,presumablyduetotheinherentadvantagesofpermanentcantileverbeamvariablecapacitorwitha650-pFdccapacitancemagnets.anda348-pFzero-to-peakaccapacitance,formedbya43.56cm2Finally,electricenergyharvestingtransducesvibrationen-
5、springsteeltopplateattachedtoanaluminumbase,drivestheergythroughtheelectricfieldsbetweenaparallelplatecapac-chargepumpatitsout-of-planeresonantfrequencyof1.56kHz.itor.Typically,chargeisinjectedintothecapacitoratmaximumTheentireharvesterrequiresonlyonegatedMOSFETforenergyflybackcontrol,greatlysi
6、mplifyingtheclockingschemeandcapacitanceandpulledoffatminimumcapacitance.Betweenavoidingsynchronizationissues.Furthermore,thesystemexhibitsthesepoints,vibrationseparatestheplatesagainsttheirattrac-astartupvoltagerequirementbelow89mV,indicatingthatitcantiveforce,performingworkontheinjectedchar
7、ge,whichisthenpotentiallybeturnedonusingjustapiezoelectricfilm.harvested[7][10].Besidesthevariablecapacitor,onecanalsoIndexTerms—Variable-capacitance-basedenergyconversion,employamovinglayerofpermanentlyembeddedcharge,orvibrationenergyharvesti
