《vacuumpump真空泵》PPT课件

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1、UnitⅡ.VacuumPumpsVacuumpumpsbeconcernedwith与…相关pumpingmechanism:loweringthemoleculesnumbercompression-expansion:pistonpump（活塞）liquidringpump（液环）rotarypumpRoot’spumpDragbyviscosity(黏性）:vaporejectingpumpDragbydiffusioneffect:vapordiffusionpumpmoleculardrag:mol

2、ecularpumpionizationeffect:ionpumpphysical/chemicalsorptionpump:sorptionpump,cryopump(低温）,gettering(吸气）pump2.1PrinciplesofpumpingAsortofpumpGastransferpumpsremovegasparticlesfromthesystem.Therearerotaryvanepump,turbomolecularpumpanddiffusionpumpingastransfer

3、pumps.Entrapmentpumpsinwhichgasparticlesthathaveenteredfromthesystemaretrappedeitherchemicallyorphysicallywithinthepump.Therearesputterionpump,sublimationpumpandsorptionpumpinentrapmentpumps.Vacuumpumpscanbeclassifiedaseithergastransferpumpsorentrapmentpumps

4、,accordingtotheiroverallpumpingmechanism.VACUUMPUMPINGMETHODSSlidingVaneRotaryPumpMolecularDragPumpTurbomolecularPumpFluidEntrainmentPumpVACUUMPUMPS(METHODS)ReciprocatingDisplacementPumpGasTransferVacuumPumpDragPumpEntrapmentVacuumPumpPositiveDisplacementVac

5、uumPumpKineticVacuumPumpRotaryPumpDiaphragmPumpPistonPumpLiquidRingPumpRotaryPistonPumpRotaryPlungerPumpRootsPumpMultipleVaneRotaryPumpDryPumpAdsorptionPumpCryopumpGetterPumpGetterIonPumpSputterIonPumpEvaporationIonPumpBulkGetterPumpColdTrapIonTransferPumpGa

6、seousRingPumpTurbinePumpAxialFlowPumpRadialFlowPumpEjectorPumpLiquidJetPumpGasJetPumpVaporJetPumpDiffusionPumpDiffusionEjectorPumpSelfPurifyingDiffusionPumpFractionatingDiffusionPumpCondenserSublimationPumpPUMPOPERATINGRANGES10-1210-1010-810-610-410-2110+2P(

7、mbar)RoughVacuumHighVacuumUltraHighVacuumVenturiPumpRotaryVaneMechanicalPumpRotaryPistonMechanicalPumpSorptionPumpDryMechanicalPumpBlower/BoosterPumpHighVac.PumpsUltra-HighVac.Pumps2.2parameterandclassificationultimatepressurelowestpressureatitsinletleakagev

8、apourpressurepressurerange(usefulpumpingaction)adjacent相近的pumpingspeed(functionofpressure)Thepumpingspeedisthevolumetricflowthroughthepump’sintakeport.specificexhaustpressureselectivity抽气选择性comp