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ID:36473666
大小:1.77 MB
页数:61页
时间:2019-05-11
《一种梳状振动型微陀螺仪的研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、分类号:v241.5题Y891028单位代码:10005学号:S200301113密级:公开北京工业大学硕士学位论文英文并列题目THESTUDY0FAC0船一DRIVEVIBRATORYMICRO~fECHANICALGYROSCOPE研究生姓名:扬晓波研究方向:微扭电丕统导师姓名:奎徨胜职称:救援论文报告提交IJ期:2QQ§生§旦学位授予日期授卜单位名称和地址:韭立王些盘坐jb塞立塑圈匡芏巫圄!!鱼呈北京丁业人学T学坝l。学位论义义。本论文的研究对微机械梳状振动式陀螺仪的设计制作具有一定的理论指导意关键
2、词微陀螺仪;角速度传感器;检测灵敏度;吸合电压IIAbstractMicromechanicalgyroscopeisasensorusedtomeasureobject’sangularra把oran91erelatiVetone—aspaceMicrosiliconVibfatorygyroscopeisanewangularspeedsensordeVeIOpedb雏edonthemicroelectronicstechnoIogyandmicromechanicalIechnology’sdeVe
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