双线振动硅微陀螺仪信号检测与控制

《双线振动硅微陀螺仪信号检测与控制》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、～，●fl喝‘毫-‘0’．t1：，’{●、矿'■东南大学硕士学位论文AbstractSiliconmicro-machinedgyroscopeasanewkindofinertialgyroscope，withthemeritsofsmallvolume，lowmass，lowcost，excellentdynamics，highreliability,andSOon血18greatpotentialityofapplicationinthefleIdsofnationaldefenceandconllTlerce．mobjectofresearchisSi

2、liconmicro-machinedlinevibratorygyroscope，whichwasdesignedbyourresearchgroup．111cweaksignaldetection，signalcontrolandrelativeproblemswereresearchedinthepaper．Firstly，themotionlawofdrivingandsignaldetectionofSiliconmicro-machinedlinevibratorygyroscopewereanalysedintheoryandtheeffecto

3、ftheinterfereontheolinloopsignaldetectionwasanalysedbysimulation．Secondly，accordingtoSiliconmicro-machinedlinevibratorygyroscopesignaldetectioncharacteristics，noisesandsourcesofthenoisesinweaksignaldetectionwereanalyzedandrelativemethodsofremovingandrestrainingthesenoisesarcanalyzed

4、andcompared．ThemethodofcoherentsignaldetectionWasadoptedtodetectweaksignalofthegyroscopeandswitchdemodulationtechniqueWasusedincoherentsignaldetection．AseriesofexperimentsofopenloopaledoneandopenloopsignaldetectionWasrealized．Finally，Thefunctionoffeedbackforcegeneratorandthenegative

5、rigidityinfeedbackforcegeneratorwereanalyzed．CloseloopcontrolsystemofsignaldetectionWasdesigned，timeandfrequencecharacteristicsofthecloseloopsystemaresimulatedbyManabandtheresultsweresatistied．Aseriesofexperimentsofthecloseloopweredone．feedbackcontrolofthesignalcausedbYmismatchofdet

6、ectioncapacitorandfeedbaekcontrolofquadraturesignalaresuccessfullyrealized．KeywordsSiliconmicro—machinedlinevibratorygyroscope，Weaksignaldetection，Signaldetectionfeedback，Feedbackforcegenerator，NegativerigidityIV，邑l；‘_’●{o．~东南大学硕士学位论文目录第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1微机电系统

7、的研究背景⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．11．1．1微机电系统的技术特点⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。l1．1．2微机电系统的应用及市场前景⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．2硅微机械陀螺仪国内外现状及其研究意义⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．2．1微惯性仪表国内外研究发展状况⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．2．2硅微机械陀螺仪的国内外发展情况⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．3本文主要的研究内容⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯51．4本章小结⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

8、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯5第二章双线振