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ID:34586832
大小:13.92 MB
页数:62页
时间:2019-03-08
《压电陶瓷驱动的微纳定位平台系统研究》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、万方数据东北大学硕士学位论文Abs订actDesignandInvestigationofMicro--positioningPiezo·-stageSystemsAbstractMicro··nanopositioningtechnologyisakeytechnologyformodemhigh-·techmodemindustry.Inprecisionmanufacturing,ultra—precisionmeasurementandmicro—manipulationhavebeenwidelyusedinmanyfields.Inrecentyears,withthedeve
2、lopmentofmodemscience,technologyandindustry,micro—nanopositioningtechnologyisrequiredtobelargestroke,highprecisionandsmallsize.What’Smore,positioningaccuracyandresolutionhaverequiredtoachievethenanoscale,Micro—nanopositioningtechnologylevelsreflectacountry’Stechnologicaldevelopmentandoverallstreng
3、th.Developmicro—narloconductedpositioningtechnologyrelatedresearch.TopromotetherapiddevelopmentofChina’Sadvancedmanufacturing,ultra—precisionmachiningandmeasurement,defenseindustryandotherhigh—techindustryhasasignificantandfar-reachingsignificancePaperisonthebasisofreviewingsystemsonmicro—nanoposi
4、tioningstageresearchandapplicationstatus.Theoreticalanalysisandsimulationstudiesaretostartatwo—dimensionalaspectsofthefocusonmicro·nanopositioningstagedesignandanalysis,systemconstruction,etc.Firstdeterminethetwo--dimensionalmicro-.nanopositioningplatformtodrivethepiezoelectricceramic,flexiblehing
5、efortheimplementingagency,theuseoftheoveralldesigncapacitivedisplacementsensorandPIDcontr01.UsingSolidworks3Dmodelingplatformonmicro—nanopositioning.whichareanalyzedandcalculatedfromthepositioningplatformstiffness,displacementandnaturalfrequencyfromtheoutputthekeyparametersDeterminethedimensionsof
6、themicro—nanopositioningstageonthisbasis,andfiniteelementsimulationstaticsThenanalyzestheprincipleofpiezoelectricceramic,forcapacitancecharacteristicsofpiezoelectricactuators,hysteresis,creepproperties,nonlinearandtemperaturecharacteristicsareanalyzedtheoretically.Amathematicalmodelofpiezoelectric
7、actuatorsisbuilt,determinethepiezoelectricactuatortransferfunction,usePIDcontrolmethodtocontrolpiezoelectricactuators,thenthesimulationcurveisobtained,demonstratingtheeffectivenessofthecontrolV。万方数据东北大学硕士学位论文Abs仃
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