075. Wafer Bonding - Applications and Technology (2004)

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1、SpringerSeriesinMATERIALSSCIENCE75Springer-VerlagBerlinHeidelbergGmbHSpringerSeriesinMATERIALSSCIENCEEditors:R.HullR.M.Osgood,Jr.J.ParisiH.WarlimontTheSpringerSeriesinMaterialsSciencecoversthecompletespectrumofmaterialsphysics,includingfundamentalprinciples,physicalproperties,materia

2、lstheoryanddesign.Recognizingtheincreasingimportanceofmaterialsscienceinfuturedevicetechnologies,thebooktitlesinthisseriesreflectthestate-of-the-artinunderstandingandcontrollingthestructureandpropertiesofallimportantclassesofmaterials.61FatigueinFerroelectricCeramics69Chemical-Mechan

3、icalPlanarizationandRelatedIssuesofSemiconductorMaterialsByD.C.LupascuEditor:M.R.Oliver62Epitaxy70ApplicationsoftheIsotopicEffectPhysicalPrinciplesinSolidsandTechnicalImplementationByG.V.PlekhanovByM.A.Herman,W.Richter,andH.Sitter71DissipativePhenomena63FundamentalsinCondensedMattero

4、fIon-IrradiatedPolymersSomeApplicationsByD.FinkByS.DattaguptaandS.Puri64MorphologyControlofMaterials72PredictiveSimulationandNanoparticlesofSemiconductorProcessingAdvancedMaterialsProcessingStatusandChallengesandCharacterizationEditors:J.DabrowskiandE.R.WeberEditors:Y.WasedaandA.Mura

5、matsu73SiCPowerMaterials65TransportProcessesDevicesandApplicationsinIon-IrradiatedPolymersEditor:Z.C.FengByD.Fink74PlasticDeformation66MultiphasedCeramicMaterialsinNanocrystallineMaterialsProcessingandPotentialByM.Yu.GutkinandLA.Ovid'koEditors:W.-H.TuanandJ.-K.Guo75WaferBonding67Nond

6、estructiveApplicationsandTechnologyMaterialsCharacterizationEditors:M.AlexeandU.GiiseleWithApplicationstoAerospaceMaterialsEditors:N.G.H.Meyendorf,P.B.Nagy,76SpirallyAnisotropicCompositesByG.E.Freger,V.N.Kestelman,andS.1.RokhlinandD.G.Freger68DiffractionAnalysisoftheMicrostructureofM

7、aterialsEditors:E.J.MittemeijerandP.ScardiVolumes10-60arelistedattheendofthebook.M.AlexeU.Gosele(Eds.)WaferBondingApplicationsandTechnologyWith372Figuresand25TablesiSpringerDr.M.AlexeProf.Dr.U.GoseleMaxPlanckInstituteofMicrostructurePhysicsWeinberg2,06120Halle(Saale),GermanyE-mail:ma

8、lexe@mpi-hal