硅基微环延时器的理论与实验分析

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1、华中科技大学硕士学位论文目录摘要..................................................................................................................IAbstract................................................................................................................II1绪论1.1课题研究背景与意义............................

2、..................................................(1)1.2课题研究现状..........................................................................................(2)1.3本论文主要研究内容..............................................................................(8)2平面光波导理论与模拟2.1波导的有效折射率与模式.......................

3、.............................................(10)2.2光波导中的传输损耗............................................................................(14)2.3耦合设计................................................................................................(17)2.4本章小结.........................................

4、.......................................................(19)3微环谐振器的理论与模拟3.1单根直波导耦合的微环谐振腔............................................................(20)3.2有下载端的微环谐振腔基本特性........................................................(27)3.3两四端口微环并联的基本特性....................................................

5、........(30)3.4zigzag基本特性.....................................................................................(34)3.5反射式微环谐振腔................................................................................(38)3.6本章小结................................................................................

6、................(44)III万方数据华中科技大学硕士学位论文4器件的制备、测试与分析4.1一般工艺................................................................................................(45)4.2降低波导散射损耗的工艺方法............................................................(46)4.3器件测试...................................................

7、.............................................(50)4.4本章小结................................................................................................(54)5总结与展望致谢............................................................