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1、Seediscussions,stats,andauthorprofilesforthispublicationat:https://www.researchgate.net/publication/289183196Signalfilteringoflow-temperaturelow-pressureplasmadiagnosedwithLangmuirprobeArticleinZhenkongKexueyuJishuXuebao/JournalofVacuumScienceandTechnology·October2013DOI:10.
2、3969/j.issn.1672-7126.2013.10.08CITATIONSREADS056authors,including:AoLiUNSWSydney7PUBLICATIONS22CITATIONSSEEPROFILESomeoftheauthorsofthispublicationarealsoworkingontheserelatedprojects:ComputationalfluiddynamicsimulationViewprojectnumericalsimulationViewprojectAllcontentfol
3、lowingthispagewasuploadedbyAoLion17May2018.Theuserhasrequestedenhancementofthedownloadedfile.第33卷第10期真空科学与技术学报2013年10月CHINESEJOURNALOFVACUUMSCIENCEANDTECHNOLOGY995郎穆尔探针低温低压等离子体诊断＊王晓冬张杨王庆李敖王瑞陈文(东北大学真空与流体工程研究所沈阳110819)SignalFilteringofLow-TemperatureLow-PressurePlasmaDiagnose
4、dwithLangmuirProbe＊WangXiaodong,ZhangYang,WangQing,LiAo,WangRui,ChenWen(SchoolofMechanicalEngineering&Automation,NortheasternUniversity,Shenyang110819,China)AbstractWeaddressedthedataprocessingofthesignalsindiagnosingalow-temperature,low-pressureplasmawithLangmuirprobe.Thec
5、orrelationbetweentheplasmapropertiesandthemeasuredcurrentandvoltage,withLangmuirprobe,wasevaluated,basedontheOrbitalMotionLimit(OML)ioncollectiontheory.Anovelmulti-digital-filtertech-nique,developedonthebasisofMATLAB,wasproposedtominimizethepossibleinterferenceoriginatedfro
6、mLangmuirprobe.Theimpactsofthedifferentfilteringtechniquesonthedataacquired,includingtheprobecurrent,electroncurrent,andthe1stand2ndderivativesoftheelectroncurrent,werecalculatedtooptimizethefilteringmethodandtoenhancetheaccuracyinplasmadiagnosiswithLangmuirprobe.KeywordsLa
7、ngmuirprobe,Plasmadiagnostics,OMLtheory,Multi-digital-filter,Digitalexperiment摘要基于OrbitalMotionLimit(OML)离子收集理论,建立了等离子体参数与朗缪尔探针电流、电压之间的函数关系。将MATLAB作为编程工具,编制计算程序,采用多重滤波方法消除朗缪尔探针对等离子体产生的干扰。分析不同滤波方法对探针电流、电子电流、电子电流的一阶和二阶微分等朗缪尔探针诊断数据滤波的影响,与自行设计的数字实验结果进行对比,选择最优滤波方法,以提高朗缪尔探针的诊断精度。
8、关键词朗缪尔探针等离子体诊断OML离子收集理论多重滤波数字实验中图分类号:O536;O461.2;TN305.8文献标识码:Adoi:10.3969/j.issn.
