膜厚对四面体非晶碳薄膜机械性能和拉曼表征的影响

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1、第14卷专辑3中国有色金属学报2004年10月V01．14S3TheChineseJournalofNonferrousMetals0ct．2004文章编号：1004—0609(2004)S3～0442一06膜厚对四面体非晶碳薄膜机械性能和拉曼表征的影响①韩杰才，朱嘉琦(哈尔滨工业大学复合材料与结构研究所，哈尔滨150001)捅要：采用过滤阴极真空电弧技术以相同的工艺条件在单晶硅衬底上制备了不同厚度的四面体非晶碳薄膜。利用表面轮廓仪测试薄膜的厚度和应力，利用纳米压入仪测试薄膜的硬度、弹性模量和临界刮擦载荷，利用可见

2、光拉曼光谱表征薄膜的结构。试验结果表明：随着膜厚的增加，薄膜的应力持续降低，当膜厚超过30nm时，应力低于5GPa；当膜厚超过300nm时，硬度和弹性模量分别接近70GPa和750GPa，十分接近体金刚石的性能指标；随着膜厚的增加，可见光拉曼光谱中衬底硅的一阶和二阶谱峰强度逐渐降低，但非晶碳一阶谱峰的最大峰强、蜂位和半高宽有特定的变化规律；峰位逐渐向低频偏移，在50～80nm膜厚范围，半高宽最窄，峰强最高。关键词：非晶金刚石；过滤阴极真空电弧；机械性能；拉曼光谱EffectsoffilmthicknessonRam

3、ancharacterizationandmechanicalpropertiesofamorphousdiamondHANJie—cai，ZHUJia—qi(CenterforCompositeMaterials，HarbinInstituteofTechnology，Harbin150001，China)Abstract：Thetetrahedralamorphouscarbon(ta-C)filmswithdifferentthicknesswerepreparedonthec—Sisub—strateund

4、erthesamedepositionconditionsbythefilteredcathodicvacuumarc(FCVA)technology．Thethicknessandstressofthefilmsweremeasuredwiththesurfaceprofiler．Thehardness，elasticmodulusandcriticalloadwereanalyzedbythenano-indentor．ThemicrostructurewascharacterizedwithvisibleRa

5、manspectroscopy．Itisshownthatthestressofthefilmscontinuouslydecreaseswiththeincreaseofthicknessofthefilms．Whenthethicknesssurpasses30nm，thestressislessthan5GPa．Whenthethicknessismorethan300nm，hardnessandelasticmodu—lusrespectivelyapproachtO70GPaand750GPathatar

6、eclosetotheonesofdiamondcrystal．TheintensityofthefirstandsecondorderpeakoftheC-SisubstrateinthevisibleRamanspectragraduallydecreaseswiththeincreaseofthickness．However．therearespecialchangingcorrelationsbetweenthemaximalintensity，peakposition，full—widthathalf-m

7、aximum(FWHM)oftheRamanspectraandthicknessofthefilms．Thepeakpositiongraduallyshiftstowardsthelowerwavenumberwiththeincreaseofthickness．Additionally，theFWHMisminimalandthemaximalintensityishighestfrom50nmto80nm．Keywords：tetrahedralamorphouscarbon；filteredcathodi

8、cvacuumarc；mechanicalproperties；Ramanspectra四面体非晶碳(ta—c)是含有较高比例四配位d键(可达70％以上)的无氢类金刚石碳n]，具备许多可与金刚石晶体相媲美的优异性能，并在电子、机械、国防和医疗等领域有着广阔的应用前景[2’5]。四面体非晶碳薄膜一般采用激光、电弧和离子束等能量形式产生粒子束沉积而成[6。]，这