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ID:32325260
大小:2.92 MB
页数:67页
时间:2019-02-03
《algan2fgan+hemt功率器件测试及封装技术研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、Abstract,Inrecentyears,withtherapiddevelopmentofsemiconductortechnology,aswellasmaterialgrowthtechnologybreakthrough,galliumnitride(GaN)whichisthoughtbethethirdgenerationofsemiconductors,hasbeengraduallyshowingitsadvantagessuchashi’ghdensityoftwo-dimensiona
2、lelectrongasandhighelectronmobilityandsaturationandSOon.Atthesametime,moreandmorescientistdotheresearchbasedonnitrogengallium(GaN).Inradiofrequencycommunications,radarandothermicrowavefields,themicrowavepowerdevicesareincreasinglyrequiredforhighperformance.
3、Theresearchbasedonwidebandgapsemiconductormaterialgalliumnitride(Gab/)microwavepowerdevicesbecomeafocusforeverycountry.Inthisdissertation,whatdiscussedisAIGaN/GaNheterojunctionmicrowavepowerdevicesmanufacturingprocess,thetechnologyofmaterialgrowth,andthebas
4、iccharacteristicsofGaNpowerdevices,including:DCcharacteristics,currentcollapse,breakdownvoltageanalysis.Ontllebasiswhatmainlyintroducedinthispaperisthemeasurementsofthegalliumnitride(GaN)powerdevicesinthemicrowaveproperties,whichincludesadetailedanalysisfro
5、mthetestingtheory,thetestprocess,tomeasurementsystemforthemicrowavetestsuchason-wafermeasurement,separationdevicetesting,small.signaltesting,large—signaltesting,loadpull(LoadPull)testing,itisnotedthatforthesmallsignalorlargesignaltestingofseparationdevicest
6、herearenotthecustomizedsolutionsCanbeuseddirectly,SOthetestfixtureinthefrequencyrangeof3.7to4.2GHzisdesignedbytheCADtoolsADSandautocad.AlthoughthecoaxialSOLTcalibrationmethodtotestisverysimpleandpopular,butwiththegradualincreaseinthe仔equency,theimpactofthet
7、estfixturecanbenotignored,SOanimprovedcalibrationmethodnamedTRLcalibrationwhichisbasedontheerrormodelofvectornetworkanalyzerWasimplementedinthispaper,butthereisnoexistingcalibrationkitsforTRLcalibration,SOitisagoodideatodesigntheTRLcalibrationkitsinthefrequ
8、encyrangeof0to6G№independentlyincluding:thru,short,open,load,anddelaylinetOsolvethisproblem.Aftermeasuringtothe9mmGaNHEMTdevice,itsperformanceisalsocomparedwiththatofSOLTcalibrationmethod,thatthegainby
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