algan2fgan+hemt功率器件测试及封装技术研究

《algan2fgan+hemt功率器件测试及封装技术研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、Abstract，Inrecentyears，withtherapiddevelopmentofsemiconductortechnology，aswellasmaterialgrowthtechnologybreakthrough，galliumnitride(GaN)whichisthoughtbethethirdgenerationofsemiconductors，hasbeengraduallyshowingitsadvantagessuchashi’ghdensityoftwo-dimensiona

2、lelectrongasandhighelectronmobilityandsaturationandSOon．Atthesametime，moreandmorescientistdotheresearchbasedonnitrogengallium(GaN)．Inradiofrequencycommunications，radarandothermicrowavefields，themicrowavepowerdevicesareincreasinglyrequiredforhighperformance．

3、Theresearchbasedonwidebandgapsemiconductormaterialgalliumnitride(Gab／)microwavepowerdevicesbecomeafocusforeverycountry．Inthisdissertation，whatdiscussedisAIGaN／GaNheterojunctionmicrowavepowerdevicesmanufacturingprocess，thetechnologyofmaterialgrowth，andthebas

4、iccharacteristicsofGaNpowerdevices，including：DCcharacteristics，currentcollapse，breakdownvoltageanalysis．Ontllebasiswhatmainlyintroducedinthispaperisthemeasurementsofthegalliumnitride(GaN)powerdevicesinthemicrowaveproperties，whichincludesadetailedanalysisfro

5、mthetestingtheory，thetestprocess，tomeasurementsystemforthemicrowavetestsuchason-wafermeasurement，separationdevicetesting，small．signaltesting，large—signaltesting，loadpull(LoadPull)testing，itisnotedthatforthesmallsignalorlargesignaltestingofseparationdevicest

6、herearenotthecustomizedsolutionsCanbeuseddirectly,SOthetestfixtureinthefrequencyrangeof3．7to4．2GHzisdesignedbytheCADtoolsADSandautocad．AlthoughthecoaxialSOLTcalibrationmethodtotestisverysimpleandpopular,butwiththegradualincreaseinthe仔equency，theimpactofthet

7、estfixturecanbenotignored，SOanimprovedcalibrationmethodnamedTRLcalibrationwhichisbasedontheerrormodelofvectornetworkanalyzerWasimplementedinthispaper，butthereisnoexistingcalibrationkitsforTRLcalibration，SOitisagoodideatodesigntheTRLcalibrationkitsinthefrequ

8、encyrangeof0to6G№independentlyincluding：thru，short,open，load，anddelaylinetOsolvethisproblem．Aftermeasuringtothe9mmGaNHEMTdevice，itsperformanceisalsocomparedwiththatofSOLTcalibrationmethod，thatthegainby