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1、摘要IC封装是半导体三大产业之一(器件设计、晶片制作和器件封装)。其后封装工序主要包括:划片、粘片、超声球焊、封装、检测、包装。划片机是IC后封装线上的第一道关键设备,其作用是把制作好的晶片切割成单元器件,为下一步单元晶片粘接做好准备。但由于与国外技术存在差距,目前我国高端划片机仍然依赖进口。为了促进IC封装设备的国产化,本设计对划片机进行了总体规划并且对关键零部件进行了详细设计在分析划片工艺要求的基础上,确定了划片机的主要功能,进而进行了划片机的各部分功能的原理方案设计。其次,提出了四种不同的结构方案,并详细对比了其优缺点,然后确定了结构方案设计,完成了划片机的总体规划。接下
2、来,针对划片工艺要求,进行了各部分结构的初步设计,包括各轴的传动方案、支承方案以及相关的结构参数。然后,根据课题要求,对划片机的Y、Z轴进行了详细设计,通过计算,分别完成了Y、Z轴的丝杠螺母机构的选型、电机的选型、导轨的选型。最后,完成了划片机Y、Z轴的装配图。关键字:划片机;总体规划;结构设计;滚珠丝杠;步进电机;滚动直线导轨;AbstractICpackagingisoneofthesemiconductorindustry(devicedesign,waferfabrication,andpackaging).Subsequentlypackagingprocessesi
3、nclude:dicing,dieattach,ultrasonicballbonding,packaging,testingandpackaging.ScribingmachineisthekeyequipmentafterthefirstlineoftheICpackage,itsroleistomakeagoodwaferintosinglecomponents,readyforthenextunitwaferbonding.Butbecausethereisagapwithforeigntechnology,China'shigh-scribingmachineisst
4、illdependentonimports.InordertopromotethelocalizationofICpackagingequipment,theoverallplanandkeycomponents'detaildesignofadicingmachinearebeendoneinthisdesign.Onthebasisofanalyzingthedicingprocess,dicingmachinemainfunctionisbeendefined.Thenthedesignofprincipalprogram,ofeachpart'sfunction,isb
5、eendone.Secondly,fourdifferentstructuralschemesareproposed,andadetailedcomparisonoftheiradvantagesanddisadvantagesisshowedinthearticle,andthenthestructureoftheprogramdesignisdetermine,amasterplandicingmachinecompleted.Next,forthedicingprocessrequirements,apreliminarydesignofeachpartofthestru
6、ctureiscompleted,includingthedriveshaftoftheprogram,supportprogramsandrelatedstructuralparameters.Then,accordingtothetaskrequirements,Y,Zaxisdicingmachinearedesignedindetail.Bycalculating,theY,theselectionofscrewnutbody,theselectionofthemotor,andrailareCompleted.Finally,theassemblydrawingofZ
7、-axisY-axisarecompleted.Keywords:请键入文字或网站地址,或者上传文档。Huàpiànjī;zǒngtǐguīhuà;jiégòushèjì;gǔnzhūsīgàng;bùjìndiànjī;gǔndòngzhíxiàndǎoguǐ源语言:中文Scribingmachine;overallplanning;structuraldesign;ballscrews;steppermotor;rollinglinearguide目录1绪论41.1引言41.2划片机的发