复杂光学表面的快刀伺服加工特性与路径规划

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1、第47卷第15期机械工程学报Vol.47No.152011年8月JOURNALOFMECHANICALENGINEERINGAug.2011DOI：10.3901/JME.2011.15.175*复杂光学表面的快刀伺服加工特性与路径规划王贵林朱登超戴一帆(国防科技大学机电工程与自动化学院长沙410073)摘要：复杂面形和微结构阵列等类型的光学元件应用范围越来越广，传统的机械加工方法难以满足面形精度和加工效率要求，超精密快刀伺服(Fasttoolservo,FTS)是实现这类零件优质高效加工的有效手段。但是在复杂光学表面的快刀伺服加工中，面形

2、的高低起伏将会使刀具和工件的相对位置实时变化，导致加工状态恶化、面形精度下降，甚至会产生刀具干涉和过切现象。针对这种情况，通过研究复杂面形快刀伺服加工中切削角的变化规律及其对刀具前角、后角的影响，给出刀具干涉的判断算法以及工艺参数的选取依据；为实现加工路径的合理规划，进行典型复杂光学表面的刀具补偿分析与算法设计；在此基础上，以正弦放射线作为对象，进行快刀伺服加工试验，测试结果表明加工面形精度达到PV0.17μm，没有发生过切和刀具干涉现象。关键词：复杂面形快刀伺服切削角刀具干涉路径规划中图分类号：TH161MachiningCharacte

3、risticsandRoutePlanningofComplexOpticalSurfacebyUsingFastToolServoWANGGuilinZHUDengchaoDAIYifan(SchoolofMechatronicsEngineeringandAutomation,NationalUniversityofDefenseTechnology,Changsha410073)Abstract：Opticalcomponentswithcomplexsurfacesormicrostructurearrayaremoreandmor

4、ewidelyapplied,butitisverydifficulttosatisfytherequirementsofsurfaceaccuracyandmachiningefficiencybyusingtraditionalmechanicalfabricatingmethods.Ultraprecisionfasttoolservo(FTS)systemcanmanufacturethesecomplexsurfacesefficientlyandaccurately.Therelativepositionbetweentheto

5、olandworkpiecesurfacewillvarycontinuouslyintheFTSmachiningprocess,owingtotheheightchangeofworkpieceprofile,andthiswillworsenthecuttingconditions,debasethemachiningaccuracy,andevenproducethephenomenonoftoolinterferenceandover-cut.Inviewofthesituation,thevaryingrulesofcuttin

6、ganglearestudiedintheFTSmachiningprocessofcomplexworkpieces,aswellastheinfluencesonrakeangleandbackangleofthetool.Thealgorithmsforidentifyingtoolinterferenceandtheselectionbasisofmachiningparametersaregiven.Inordertorealizerationalrouteplanning,theanalysisandalgorithmdesig

7、noftoolcompensationareaccomplishedinthemachiningprocessoftypicalcomplexopticalsurface.Onthebasisoftheabovework,akindofrepresentativecomplexworkpiece,radialsinusoidalworkpiece,ismanufacturedbyusingtheFTSsystem.Themeasuringresultsindicatethataccuracyofmachinedsurfacecanreach

8、PV0.17μm,andtheover-cutandtoolinterferencedonotoccur.Keywords：ComplexsurfaceFasttoolservo