双波段截止分色滤光片研究

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1、双波段截止分色滤光片研究曹晶辉苏宙平胡莹胡立发朱华新江南大学理学院江苏省轻工光电工程技术研宄中心为实现45°入射情况下K9基底上双波段截止分色的特性（截止带波长0.5°.68um、0.73°.79um,通带波长0.83°.87um）,釆用F-P型的带通滤光片膜系结构为初始结构，与常规设计理念相比有效减少丫膜层的数量，薄膜的高折材料采用Ti02，低折材料采用Si02，以实现双波段截止的目的。膜层的设计层数为23层，总厚度为2.278urn,借助电子束蒸发物理气相沉积法实现了镀制，利用分光光度计对镀制样品的透过率进行评估。测试结果显示，截止区（0.5°.68um和0.73°.79um）平均截

2、止深度分别达到了12.57%和20.39%,通带0.8,87um波段内的平均透过率达到了91.35%,样品测试曲线与设计相比，“蓝移”将近10nm。薄膜样品基本实现了设计目标，具有双波段截止、高通带透过率的特性。在环境测试中：薄膜表现出显著的稳定性，膜层间匹配度适宜。该双波段截止分色滤光片能够应用在一些极端的情况下。关键词：光学薄膜;电子束蒸发物理气相沉积;滤光片;基金：上海市全固态激光器与应用技术重点实验室开放课题（2012ADL03）StudyofDual-bandCut-offforEdgeFilterCAOTing-huiSUZhou-pingHUYingHULi_faZHUHu

3、a—xinJiangsuProvincialResearchCenterofLightIndustrialOptoelectronicEngineeringandTechnology，SchoolofScience，JiangnanUniversity;Abstract：Torealizethecharactersofadual-bandfilterthatselectivelytransmitlightofwavelengthsofO.83-0.87PinbutcutoffthewavelengthsofQ.5-0.68umand0.73-0.79umona45°incidentang

4、leonK9substrate,atypeofF—Pbandpassfilterwaschosentobetheinitialstructurewhicheffectivelyreducethenumberofthethinfilmcomparedwiththeroutinedesignconcept.Thehighindexmaterialoftitaniumoxide(Ti02)andthelowindexmaterialofsiliconoxide(Si02)wereusedduringthecourse.Thethicknessof23layerswas2.278um.Theel

5、ectronbeamphysicalvapordeposition(EBPVD)wasusedtofabricatethecoatings.Thetransmittanceofthesamplewasmeasuredbyusingthespectrophotometer.Theaveragecutoffdepthis12.57%and20.39%correspondedtothebandfrom0.5umto0.68ymandthebandfrom0.73umto0.79umrespectivelyfromthetestresult.Theaveragetransmittanceisup

6、to91.35%forthepassbandfrom0.83umto0.87Um.Itappearsalmostthesamewiththedesigningresultthatthefigureoftransmittanceshiftstotheshortwavelengthby10nm.Beyondthis,theedgefiltercutsoffindual-bandandgetsthehightransmittanceinpassband.Intheenvironmentaltests,thecoatingsmatchwellwitheachotherwhichisremarka

7、blystable.So,thedual-bandcut-offedgefiltercanbeappliedinextremecases.Keyword：opticalthinfilm;electronbeamphysicalvapordeposition(EBPVD);filter;1引言截止滤光片选择性地透过特定波段的光波而抑制其他波段的光波，使得光波更合理地被利用，如今己遍布在各行各业中，例如在数码相机中图像数据的捕捉m、光通