最新X-ray diffraction and X-ray reflectivity applied to investigation教学讲义PPT.ppt

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1、X-raydiffractionandX-rayreflectivityappliedtoinvestigationOutlinesStructuremodelofmultilayerswithnon-continuousinterfacesExperimentalmethodsandtheoreticalapproachesforstructureinvestigationofmultilayersX-rayreflectivity(XRR)Small-angleX-rayscattering

2、ReciprocalspacemappingWide-angleXRDApplications,Examples(Fe/Au)PhysikalischesKolloquiumTUC,18.6.2003MicrostructureModelFe/Au-MultilayerTEMcourtesyofProf.J.Zweck,UniversityofRegensburgAnticipatedchangesofthemultilayermicrostructure(afteratemperaturetr

3、eatment)10nmPhysikalischesKolloquiumTUC,18.6.2003X-RayReflectivityTheoreticalbackgroundSubstrateMultiple(dynamical)scatteringofX-raysOpticaltheoryforsmoothinterfaces(nointerfaceroughness)Basedon:L.G.Parrat,Phys.Rev.95(1954)359.RecursiveformulaPhysika

4、lischesKolloquiumTUC,18.6.2003X-RayReflectivityTheoreticalbackgroundSubstrateChangeintheFresnelreflectioncoefficient(Debye-Wallerfactor)X-rayreflectivityofmultilayerswithacertaininterfaceroughnessL.Névot,P.Croce,Rev.Phys.Appl.15(1980)761.G.H.Vineyard

5、,Phys.Rev.B26(1982)4146.S.K.Sinha,E.B.Sirota,S.Garoff,H.B.Stanley,Phys.Rev.B38(1988)2297.DWBATheinterfacesmustbecontinuoustjtj-1sj-2PhysikalischesKolloquiumTUC,18.6.2003X-rayDiffuseScatteringoncontinuousinterfacesDistortedwaveBornapproximation-DWBADi

6、fferentialcross-sectionofthediffusescatteringS.K.Sinha,E.B.Sirota,S.Garoff,H.B.Stanley,Phys.Rev.B38(1988)2297.V.Holý,J.Kuběna,I.Ohlídal,K.Lischka,W.Plotz,Phys.Rev.B47(1993)15896.V.Holý,T.Baumbach,Phys.Rev.B49(1994)10668.SubstrateC(x,y)…In-planecorrel

7、ationofinterfacecorrugationsInamultilayer:additionallytheverticalcorrelationPhysikalischesKolloquiumTUC,18.6.2003X-rayReflectivityStructuremodelSubstrateLayerALayerBLayerCLayerXCappinglayerJ.H.Underwood,T.W.Barbee,Appl.Opt.20(1981)3027.P.Lee,Appl.Opt

8、.22(1983)1241.B.Vidal,P.Vincent,Appl.Opt.23(1984)1794.S.K.Sinha,E.B.Sirota,S.Garoff,H.B.Stanley,Phys.Rev.B38(1988)2297.V.Holý,J.Kuběna,I.Ohlídal,K.Lischka,W.Plotz,Phys.Rev.B47(1993)15896.z,t,(top),t,(X),t,(C),t,(B),t,(A),(S)Physikalisches