微波辅助化学气相沉积法合成硅纳米线ppt课件.ppt

《微波辅助化学气相沉积法合成硅纳米线ppt课件.ppt》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、SiliconNanowiresSynthesizedviaMicrowave-AssistedChemicalVaporDeposition组员：蒋振龙王美玲孙建会孙瑞瑞董思宁殷月伟第十七组主要内容IntroductionExperimentExperimentalResultsDiscussionApplicationofSiNWsIntroductionofsiliconnanowiresSiliconnanowireshaveuniqueelectronicandopticalproperties,itcanbewildlyusedinsensorandelectr

2、onicindustries.Thesynthesisofsiliconnanowiresarehigh-costorhigh-energyconditions.合成硅纳米线的几种方法激光烧蚀：海绵状的SiNWs水热法：（20nm）分子束取向附生法(MBE）金属催化化学腐蚀方法（单晶性好、轴向可控）AAO模板法热物理蒸发法SiNWsbyLaserAblationTEMimageofas-grownSiNWsbythethermalphysicalevaporation,AnewmethodtosynthesissiliconnanowiresThisisnotanewmeth

3、od.Microwavesourceshavepreviouslybeenemployedinthesynthesisofcarbonnanotubes.However,tothebestofourknowledge,applicationofamicrowavefieldhasnotbeenreportedonthegrowthofSiNWsatambientconditionspriortothiswork.ExperimentconditionAnunmodified1100  W,2.45  GHzEmersondomesticmicrowaveovenTrichlo

4、rosilane(99%)fromAldrichSubstratematerials:（i）1×4  cmITO-coatedslidesfromHartfordGlassCo.(surfaceresistivity≈15Ω/□)thatwerethinneddownto1  mmthicknessbymechanicalpolishing(substrateA).（ii）1 mmthickITO-coatedglassslidesfromAldrich(surfaceresistivity≈15Ω/□)thatwerecutintorectanglesof1×4  cm(s

5、ubstrateB).ThedifferenceoftwosubstratesSubstrateA:SubstrateB:Experimentsubstratesdegreased（acetone）Rinse(2-propanol；deionizedwater)dryDipping（SnO2colloidalsolution）withdrawndrythermaltreatment(300℃，3h）microwavereactionvialirradiated(0.5min)testSchemeofdepositionScheme1.Schemeofdeposition.HS

6、iCl3(g)+ITO(S)+µwaveradiation→Si(ads)+ITO(S)+HCl(g)+Cl2(g)Results(SEM)Fig.1.SEMimagesofstructuresobtainedondifferentregionsonaconductivesubstrate,substrateA:(a–b)heatedsubstrate(withanaveragelengthof30andaveragediameterof3)(d–f)heatedsubstrate(averagelengthof30)(g--h)unheatedsubstrateResult

7、s(SEM)Fig.2.SEMimagesofSiNWs(30–45  nmdiameter)interspersedwithSicrystallites(0.3µmdiameter)depositedonconductiveITOsurface(substrateB).Thevariouspicturesaredifferentmagnificationsofthesameregionofthesubstrate.Results(SEM)Fig.3.SEMimagesofporousSi/agglom