物理实验7.8金属薄膜电阻率的测量.docx

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1、银薄膜电阻率测量数据记录表膜厚：44.4nm电流I/mA正向电压U+/Mv反向电压U-/mV平均电压U/mV0.1510.1620.1630.1630.1720.1860.1850.1860.1930.2070.2080.2080.2230.2410.2400.2410.2810.3010.3020.3020.3160.3400.3390.3400.3560.3830.3840.3840.4020.4330.4340.4340.4480.4820.4830.483电阻率为216.879（Ω/nm）膜厚：88.8n

2、m电流I/mA正向电压U+/Mv反向电压U-/mV平均电压U/mV0.5320.1210.1260.1241.7430.4040.4090.4073.2640.7590.7640.7624.7441.1051.1101.1085.6421.3141.3201.3177.5391.7581.7631.7619.1632.1382.1432.14110.6792.4922.4972.49512.2212.8542.8592.857电阻率为94.11（Ω/nm）膜厚：133.2nm电流I/mA正向电压U+/Mv反向电压

3、U-/mV平均电压U/mV0.7940.1070.1120.1102.3720.3270.3320.3303.9880.5530.5580.5565.2350.7270.7320.7306.9040.9600.9650.9638.4881.1811.1871.1849.7851.3621.3681.36513.1931.8391.8441.84214.8712.0732.0792.076电阻率为84.35（Ω/nm）膜厚：222nm电流I/mA正向电压U+/Mv反向电压U-/mV平均电压U/mV3.9700.37

4、60.3820.37910.0900.9620.9670.96514.4801.3821.3871.38521.4802.0522.0582.05526.6702.5472.5522.55033.1703.1713.1763.17439.7503.8013.8063.80445.2304.3254.3304.32851.1504.8924.8974.895电阻率为96.30（Ω/nm）膜厚：277.5nm电流I/mA正向电压U+/Mv反向电压U-/mV平均电压U/mV3.9900.1240.1290.12711.

5、4800.3630.3680.36615.5500.4930.4980.49620.0100.6350.6400.63825.1700.8000.8050.80330.1500.9580.9630.96136.5101.1611.1661.16442.6501.3571.3111.33454.9701.7491.7551.752电阻率为39.87（Ω/nm）银薄膜电阻率和膜厚的实验曲线电阻率（Ω/nm）膜厚（nm）216.87944.494.1188.884.35133.296.322239.87277.5