倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究.pdf

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1、第26卷第10期传感技术学报Vo1．26No．1O2013年10月CHINESEJOURNALOF"SENSORSANDACTUATORS0ct．2013StudyofSelf-CalibrationDONGLinxi，LOUJinfeng(TheKeyLaboratoryofRFCircuitsandSystemofEducation，HangzhouDianziUniversity，Hangzhou310018，China)Abstract：Thispaperstudiestheself-calibrationofME

2、MScapacitiveaccelerometertosimulatethevibratortoincreasetheeficiencyandreducethecostofcalibration，andanalysestheeffectofDRIEfabricationerroronself-calibrationofsensorstheoretically．Thegapofthesensorusedinthispaperis4I,zm，andthethicknessis80Ixm．Theself-calibrationo

3、fsensorssimulatesthecalibrationofmechanicalvibratorwhichisvibratingatanamplitudeof1g．Asthecombsofthecapacitivesensorsfabricatedbydeepreactiveionetching(DRIE)existplus—minusslopeangle，thispaperanalysestheeffectoftheslopeangleontheself-calibrationofMEMScapacitiveacc

4、elerometer．Theresultsshowthattheerrorcausedbyslopeangleisobvious，whichgetsmoreobviouswithbiggerslopeangleinopenloopcircuit．Comparingwiththeself-calibrationofparallelcombsensors，theerrorofself-calibrationisabout10％whentheslopeangleis-+0．1。；27％whentheslopeangleis0．5

5、。；andpull—inoccurswhentheslopeangleis-0．5O．Itprovesthatinopen—loopcircuit，theslopeangleaffactstheself-calibrationobviously．Buttheerorgetsmuch1owerwhensensoriSincloseloopcircuit．WhentheslopeangleiSlessthen+0．5。．theerrorofself-calibrationislessthan0．6％，whichiscloset

6、otheerroroftheabsolutecalibrationofLaserInteferometer(0．5％～1％)，andprovesthatthemethodofself-calibrationispracticable．Meanwhile，thispaperanalysesthereasonshowslopeangleaffactself-calibration，andcomeupwithanideawhichcanlowertheerrorofself-calibrationthatcausedofslop

7、eangleinopenloopcircuitandstatethespecificmeasure．Keywords：MEMS；capacitiveaccelerometer；self-calibration；plus—minusslopeangleEEACC：7110；7130doi：10．3969／j．issn．1004-1699．2013．10．008倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究木董林玺，楼进峰(杭州电子科技大学射频电路与系统教育部重点实验室，杭州310018)摘要：研究MEMS电容式加速度传

8、感器的自我标定方法，模拟机械振动台标定，提高标定效率和降低标定成本，并从理论上分析了DRIET艺误差对传感器自我标定精度的影响。分析的传感器模型梳齿间距为4m，厚度80m，传感器自我标定以模拟幅值为1g的振动台标定为例，针对DRIET艺加T的高深宽比梳齿电容存在正负侧壁倾斜角的情况，分析了该倾斜角对梳齿