OLED面板制造流程(全英文).ppt

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1、OLEDProcessITOsputteringITOpatterningCleaningPre-treatmentITOtestSynthesisPurificationMaterialtestDepositionPackageDevicetestPixelationBasicProcessITOGlassPRcoatingApplyInsulationlayer+PRcoatingInsulationlayerDevelopingDeveloping+EtchingManufacturingProcessITOGlassIns

2、ulationlayerPhotosensitivematerialcoatingOverhangRampartDevelopingManufacturingProcessITOGlassInsulationlayerRampartOverhangManufacturingProcessITOGlassInsulationlayerRampartOverhangEmittinglayersManufacturingProcessITOGlassInsulationlayerRampartOverhangEmittinglayers

3、CathodeSideviewEncapsulationManufacturingProcessSubstratesPreparation-ITOpatterningSpincoatingExposurePre-bakeSoft-bakeDevelopEtchingPhotoMaskPhotoresisterITOGlassUVlightManufacturingProcessOrganiclayersInsulatorITOGlassCathodeShort(leakagecurrent)SubstratesPreparatio

4、n-PixelationManufacturingProcessRibITOGlassCathodeSubstratesPreparation-Cathodeseparator(Rib)ManufacturingProcessManufacturingProcessSubstratesPreparation-Pre-treatmentManufacturingProcessDeposition-ThermoevaporationManufacturingProcessDeposition–OVPD(OrganicvaporPhas

5、eDeposition)ManufacturingProcessManufacturingProcessManufacturingProcessDeposition–LinerSourceManufacturingProcessDeposition–VerticalIn-LineMachineManufacturingProcessManufacturingProcessDeposition–Ink-JetPrinterManufacturingProcessDeposition–Maskforside-by-sideManufa

6、cturingProcessDeposition–CathodeManufacturingProcessDeposition–TransparentCathodeITOsputteringCleaningPre-treatmentMaterialDepositionEncapsulationDevicetestBasicProcessPretreatmentOrganicchamberw/oalignerElectrodechamberSputteringchamberL/ULchamberOrganicchamberw/alig

7、nerEncapsulationTFTsubstrateAnode(ITO)HI-406HT-320RD-001/AlQ3AlQ3Cathode(Al)AlQ3:LiTFTsubstrateAnode(ITO)HI-406HT-320C545T/AlQ3AlQ3Cathode(Al)AlQ3:LiTFTsubstrateAnode(ITO)HI-406HT-320BD-52/BH-140AlQ3Cathode(Al)AlQ3:LiThelayerstructuresofR,G,BOLEDBlueGreenRedTopinsulat

8、orITOGlassCathodeManufacturingProcessAlignmentmarkforsubstrateandoffsetmethod.190mm±0.055mm±0.055mm±0.05Φ80μｍShape:●or■or+CC